Design of a Piezoelectric Ultrasonic Motor for Micro-Robotic Application

Akın, Tayfun
Başaran, Dilek
Erden, Abdülkadir
In a piezoelectric ultrasonic motor, exciting at least two orthogonal mechanical vibration modes of the composite stator using single or orthogonal multiple high frequency AC signals generates a mechanical vibration on the stator surface. The rotor is pressed against the stator's surface and a rotation is produced by frictional interaction between the touching stator and rotor surfaces. Piezoelectric ultrasonic motors, which have superior characteristics like; high torque at low speed, frictional locking at the power-off stage, absence of magnetic interference and compactness in size, are good candidates for robotics, automation, medical applications and various other fields. A miniaturized piezoelectric ultrasonic motor, the dimensions of which are 5.0 mm in diameter and 10 mm in length was developed. Four flattened surfaces were ground on the outer surface of a metal tube. Four PZT based piezoelectric ceramics were bonded onto these flat surfaces. The asymmetrical surface of the stator developed the split of the two degenerated orthogonal bending modes, resulting in a wobble motion. A rod through a pair of ferrules was used as the rotor of this motor. We carried out a Finite Element Analysis using ATILA code to optimize the orientation of piezoelectric plates on the other surface of the metal tube to equate the two orthogonal bending mode frequencies. Driving principal and motor characteristics 1. are explained after reviewing recent development of compact piezoelectric ultrasonic motors. We intend to use this motor in the actuation mechanism of micro robotics
Int. Conf. Mechatronic Design and Modeling (2002)


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Citation Formats
T. Akın, D. Başaran, and A. Erden, “Design of a Piezoelectric Ultrasonic Motor for Micro-Robotic Application,” presented at the Int. Conf. Mechatronic Design and Modeling (2002), 2002, Accessed: 00, 2021. [Online]. Available: