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Non-equilibrium molecular dynamics simulation of electromigration in aluminum-based metallic interconnects
Date
2006-12-01
Author
Şen, Fatih Gürçaǧ
Aydınol, Mehmet Kadri
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The effect of alloying elements in aluminum on diffusion behavior was investigated using non-equilibrium molecular dynamics (NEMD) under the effect of electromigration wind force. The electromigration wind force was computed based on a theory using the pseudopotential formalism of the elements, where it depends on the type and distribution of the imperfections in the lattice. It was found that the electromigration force on the impurity depends on the scattering power of the atom, which is related to the chemical valence. Elements like Cu, Li and Na gave low values, but the incorporation of such forces into molecular dynamics simulations underline the importance of the electromigration force distribution on the host aluminum atoms. In this regard, in NEMD formalism, we calculated the atomic jump frequency of aluminum atoms in alloys containing different impurity elements like Cu, Mg, Mn, Na, Sn and Ti. It was found that the electromigration diffusion process slowed down considerably, compared to pure Al, in alloys containing elements having a softer Al-M pair potential, namely Cu, Mn and Sn.
Subject Keywords
Electromigration
,
Diffusion
,
Non-equilibrium molecular dynamics
URI
https://dergipark.org.tr/tr/pub/tbtkengineering/issue/12148/145088
https://hdl.handle.net/11511/83789
Journal
Turkish Journal of Engineering and Environmental Sciences
Collections
Department of Metallurgical and Materials Engineering, Article
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F. G. Şen and M. K. Aydınol, “Non-equilibrium molecular dynamics simulation of electromigration in aluminum-based metallic interconnects,”
Turkish Journal of Engineering and Environmental Sciences
, pp. 387–394, 2006, Accessed: 00, 2021. [Online]. Available: https://dergipark.org.tr/tr/pub/tbtkengineering/issue/12148/145088.