MEMS and Microsystem Technologies for Microsensors and Biological Microdevices

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2006-09-11

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Külah, Haluk
Akın, Tayfun

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https://hdl.handle.net/11511/85717

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MEMS BASED MULTI-MODE MULTI-CHANNEL PIEZOELECTRIC SENSOR FOR FULLY IMPLANTABLE COCHLEAR IMPLANTS Pirim, Feyza; Külah, Haluk; Özer, Mehmet Bülent; Department of Micro and Nanotechnology (2022-9) This thesis presents a novel multi-mode, multi-channel piezoelectric sensor with broad bandwidth that is placed on the ossicles via an attachment system. The proposed sensor collects the vibration of the ossicles and mechanically filters the incoming sound. The finite element model of the middle ear is constructed as a starting point to examine the characteristics of the middle ear. The vibration characteristic of the ossicle chain is studied and the most suitable locations for the sensor placement are...
Mems based microbial fuel cell with microliter volume for microscale power generation Şen Doğan, Begüm; Külah, Haluk; Department of Micro and Nanotechnology (2020-9) Fuel cells can be a part of the solution to energy problem in the world. They can supply power in both macro and micro scales. Especially, MEMS based microscale microbial fuel cells (μMFC) may hold the answer to manufacture easy, cheap, fast, and mobile power sources and sensors. μMFCs are electrochemical devices converting chemical energy into electrical energy utilizing microorganisms as biocatalyst, instead of precious metal catalysts used in conventional fuel cells. They can be integrated to power...
MEMS based multi-channel piezoelectric acoustic transducer for fully implantable cochlear implants Yüksel, Muhammed Berat; Külah, Haluk; Department of Electrical and Electronics Engineering (2020) This thesis presents multi-channel acoustic MEMS transducer that is able to work within the audible frequency range (250-5500 Hz) and mimic the operation of a cochlea by filtering incoming sound. This transducer is composed of eight thin film piezoelectric cantilever beams possessing different resonance frequencies. The transducer is well suited to be implanted in a middle ear cavity with an active volume of 5 x 5 x0.6 mm3 and 4.8 mg. Resonance frequencies and piezoelectric outputs of the beams are modeled ...
MEMS resonant load cells for micro-mechanical test frames: feasibility study and optimal design Torrents, A.; Azgın, Kıvanç; Godfrey, S. W.; Topalli, E. S.; Akın, Tayfun; Valdevit, L. (IOP Publishing, 2010-12-01) This paper presents the design, optimization and manufacturing of a novel micro-fabricated load cell based on a double-ended tuning fork. The device geometry and operating voltages are optimized for maximum force resolution and range, subject to a number of manufacturing and electromechanical constraints. All optimizations are enabled by analytical modeling (verified by selected finite elements analyses) coupled with an efficient C++ code based on the particle swarm optimization algorithm. This assessment i...
MEMS accelerometers and gyroscopes for inertial measurement units Erişmiş, Mehmet Akif; Akın, Tayfun; Department of Electrical and Electronics Engineering (2004) This thesis reports the development of micromachined accelerometers and gyroscopes that can be used for micromachined inertial measurement units (IMUs). Micromachined IMUs started to appear in the market in the past decade as low cost, moderate performance alternative in many inertial applications including military, industrial, medical, and consumer applications. In the framework of this thesis, a number of accelerometers and gyroscopes have been developed in three different fabrication processes, and the ...

Citation Formats

H. Külah and T. Akın, “MEMS and Microsystem Technologies for Microsensors and Biological Microdevices,” 2006, Accessed: 00, 2021. [Online]. Available: https://hdl.handle.net/11511/85717.