MEMS accelerometers and gyroscopes for inertial measurement units

Download

index.pdf

Date

2004

Author

Erişmiş, Mehmet Akif

Metadata

Show full item record

Item Usage Stats

463
views

199
downloads

This thesis reports the development of micromachined accelerometers and gyroscopes that can be used for micromachined inertial measurement units (IMUs). Micromachined IMUs started to appear in the market in the past decade as low cost, moderate performance alternative in many inertial applications including military, industrial, medical, and consumer applications. In the framework of this thesis, a number of accelerometers and gyroscopes have been developed in three different fabrication processes, and the operation of these fabricated devices is verified with extensive tests. In addition, the fabricated accelerometers were combined with external readout electronics to obtain hybrid accelerometer systems, which were tested in industrial test facilities. The accelerometers and gyroscopes are designed and optimized using the MATLAB analytical simulator and COVENTORWARE finite element simulation tool. First set of devices is fabricated using a commercial foundry process called SOIMUMPs, while the second set of devices is fabricated using the electroplating processes developed at METU-MET facilities. The third set of devices is designed for a new advanced process based on DRIE, which is under development. Mechanical and electrical test results of the fabricated accelerometers and gyroscopes are in close agreement with the designed values. The testing of the SOI and nickel accelerometers is also performed in industrial test environments. In order to perform these tests, accelerometers are hybrid connected to commercially available capacitive readout circuits. These accelerometer systems require only two DC supply voltages for operation and provide an analog output voltage related to the input acceleration. The industrial tests show that the SOI accelerometer system yields a 799 æg/vHz average noise floor, a 1.8 mg/vHz peak noise floor, a 22.2 mV/g sensitivity, and a 0.1 %

Subject Keywords

Electronics.

URI

http://etd.lib.metu.edu.tr/upload/12605331/index.pdf
https://hdl.handle.net/11511/14516

Collections

Graduate School of Natural and Applied Sciences, Thesis

Suggestions

OpenMETU
Core

Development of a pc numerical system for high voltage sphere gap control Kasap, Onur; Hızal, Mirzahan; Department of Electrical and Electronics Engineering (2005) In this thesis, a high precision motion and position control system has been developed and applied to a high voltage sphere gap control and measurement system. The system is able to support up to 3-axes position and motion control. The control system includes a microcontroller card, three DC servo motor driver cards and a data storage unit. To provide communication between computer and motion control system, the Universal Serial Bus (USB) port is used. The microcontroller card is equipped with an USB interf...
High performance readout electronics for uncooled infrared detector arrays Yıldırım, Ömer Özgür; Akın, Tayfun; Department of Electrical and Electronics Engineering (2006) This thesis reports the development of high performance readout electronics for resistive microbolometer detector arrays that are used for uncooled infrared imaging. Three different readout chips are designed and fabricated by using a standard 0.6 m CMOS process. Fabricated chips include a conventional capacitive transimpedance amplifier (CTIA) type readout circuit, a novel readout circuit with dynamic resistance nonuniformity compensation capability, and a new improved version of the CTIA circuit. The fabr...
Millimeter wave gunn diode oscillators Lüy, Ülkü; Toker, Canan; Department of Electrical and Electronics Engineering (2007) This thesis presents the design and implementation of a millimeter-wave Gunn diode oscillator operating at 35 GHz (Ka (R) 26.5-40 GHz Band). The aim of the study is to produce a high frequency, high power signal from a negative resistance device situated in a waveguide cavity by applying a direct current bias. First the physics of Gunn diodes is studied and the requirements that Gunn diode operates within the negative differential resistance region is obtained. Then the best design configuration is selected...
Development of electrochemical etch-stop techniques for integrated MEMS sensors Yaşınok, Gözde Ceren; Akın, Tayfun; Department of Electrical and Electronics Engineering (2006) This thesis presents the development of electrochemical etch-stop techniques (ECES) to achieve high precision 3-dimensional integrated MEMS sensors with wet anisotropic etching by applying proper voltages to various regions in silicon. The anisotropic etchant is selected as tetra methyl ammonium hydroxide, TMAH, considering its high silicon etch rate, selectivity towards SiO2, and CMOS compatibility, especially during front-side etching of the chip/wafer. A number of parameters affecting the etching are inv...
High performance MEMS gyroscopes Azgın, Kıvanç; Akın, Tayfun; Department of Electrical and Electronics Engineering (2007) This thesis reports development of three different high performance, low g-sensitive micromachined gyroscopes having single, double, and quadruple masses. The single mass gyroscope (SMG) is developed for comparison of its performance with the double mass gyroscope (DMG) and quadruple mass gyroscope (QMG). DMG is a tuning fork gyroscope, diminishing the effects of unpredictable g-loadings during regular operation, while QMG is a twin tuning fork gyroscope, developed for a uniform and minimized g-sensitivity....

Citation Formats

M. A. Erişmiş, “MEMS accelerometers and gyroscopes for inertial measurement units,” M.S. - Master of Science, Middle East Technical University, 2004.