Show/Hide Menu
Hide/Show Apps
Logout
Türkçe
Türkçe
Search
Search
Login
Login
OpenMETU
OpenMETU
About
About
Open Science Policy
Open Science Policy
Open Access Guideline
Open Access Guideline
Postgraduate Thesis Guideline
Postgraduate Thesis Guideline
Communities & Collections
Communities & Collections
Help
Help
Frequently Asked Questions
Frequently Asked Questions
Guides
Guides
Thesis submission
Thesis submission
MS without thesis term project submission
MS without thesis term project submission
Publication submission with DOI
Publication submission with DOI
Publication submission
Publication submission
Supporting Information
Supporting Information
General Information
General Information
Copyright, Embargo and License
Copyright, Embargo and License
Contact us
Contact us
MEMS resonant load cells for micro-mechanical test frames: feasibility study and optimal design
Download
index.pdf
Date
2010-12-01
Author
Torrents, A.
Azgın, Kıvanç
Godfrey, S. W.
Topalli, E. S.
Akın, Tayfun
Valdevit, L.
Metadata
Show full item record
This work is licensed under a
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
.
Item Usage Stats
190
views
0
downloads
Cite This
This paper presents the design, optimization and manufacturing of a novel micro-fabricated load cell based on a double-ended tuning fork. The device geometry and operating voltages are optimized for maximum force resolution and range, subject to a number of manufacturing and electromechanical constraints. All optimizations are enabled by analytical modeling (verified by selected finite elements analyses) coupled with an efficient C++ code based on the particle swarm optimization algorithm. This assessment indicates that force resolutions of similar to 0.5-10 nN are feasible in vacuum (similar to 1-50 mTorr), with force ranges as large as 1 N. Importantly, the optimal design for vacuum operation is independent of the desired range, ensuring versatility. Experimental verifications on a sub-optimal device fabricated using silicon-on-glass technology demonstrate a resolution of similar to 23 nN at a vacuum level of similar to 50 mTorr. The device demonstrated in this article will be integrated in a hybrid micro-mechanical test frame for unprecedented combinations of force resolution and range, displacement resolution and range, optical (or SEM) access to the sample, versatility and cost.
Subject Keywords
Mechanical Engineering
,
Electrical and Electronic Engineering
,
Mechanics of Materials
,
Electronic, Optical and Magnetic Materials
URI
https://hdl.handle.net/11511/36248
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
DOI
https://doi.org/10.1088/0960-1317/20/12/125004
Collections
Department of Mechanical Engineering, Article
Suggestions
OpenMETU
Core
Analysis and characterization of an electrostatically actuated in-plane parylene microvalve
Yıldırım, Ender; Külah, Haluk (IOP Publishing, 2011-10-01)
This paper presents analysis and implementation of a simple electrostatic microvalve designed for use in parylene-based lab-on-a-chip devices. The microvalve utilizes an in-plane collapsing diaphragm. To investigate the pull-in behavior of the diaphragm and flow characteristics, a thorough analysis is carried out using the finite element method. Microvalves with different diaphragm radii are fabricated using surface micromachining techniques. Pull-in tests are carried out under the no-flow condition with ai...
Modeling and fabrication of electrostatically actuated diaphragms for on-chip valving of MEMS-compatible microfluidic systems
Atik, Ali Can; Ozkan, Metin Dundar; Ozgur, Ebru; Külah, Haluk; Yıldırım, Ender (IOP Publishing, 2020-11-01)
This paper presents an analytical model to estimate the actuation potential of an electrostatic parylene-C diaphragm, processed on a glass wafer using standard microelectromechanical systems (MEMS) process technology, and integrable to polydimethylsiloxane (PDMS) based lab-on-a-chip systems to construct a normally-closed microvalve for flow manipulation. The accurate estimation of the pull-in voltage of the diaphragm is critical to preserve the feasibility of integration. Thus, we introduced an analytical m...
An on-die ultra-low voltage DC-DC step-up converter with voltage doubling LC-tank
Jayaweera, H. M. P. C.; Pathirana, W. P. M. R.; Muhtaroglu, Ali (IOP Publishing; 2016-12-01)
In this paper we report the design, characterization and verification of a novel on-die ultra-low voltage DC-DC converter circuit for energy harvester applications in 0.18 mu m complementary metal oxide semiconductor (CMOS) technology. The circuit self-starts, does not use off-chip components, and is thus suitable for use in highly integrated low cost systems. The first version of the design has a five-stage charge-pump stimulated by an oscillator with two center-tap inductors. It is validated on a test chi...
Ultrathick and high-aspect-ratio nickel microgyroscope using EFAB multilayer additive electroforming
Alper, Said Emre; Ocak, Ilker Ender; Akın, Tayfun (Institute of Electrical and Electronics Engineers (IEEE), 2007-10-01)
This paper presents a new approach for the development of a microgyroscope that has a 240-/mu m-thick multilayer electroformed-nickel structural mass and a lateral aspect ratio greater than 100. The gyroscope is fabricated using commercial multilayer additive electroforming process EFAB of Microfabrica, Inc., which allows defining the thickness of different structural regions, such as suspensions, proof mass, and capacitive electrodes, unlike many classical surface-micromachining technologies that require a...
An electromagnetic micro energy harvester based on an array of parylene cantilevers
Sari, Ibrahim; Balkan, Raif Tuna; Külah, Haluk (IOP Publishing, 2009-10-01)
This paper presents the design, optimization and implementation of an electromagnetic type vibration-to-electrical micro energy harvester. The proposed harvester implements a new design employing array of parylene cantilevers on which planar gold coils are fabricated. The micro harvester generates voltage by virtue of the relative motion between the coils and a stationary magnet. The coils are connected electrically in series to sum up the voltage output from individual cantilevers. The number of cantilever...
Citation Formats
IEEE
ACM
APA
CHICAGO
MLA
BibTeX
A. Torrents, K. Azgın, S. W. Godfrey, E. S. Topalli, T. Akın, and L. Valdevit, “MEMS resonant load cells for micro-mechanical test frames: feasibility study and optimal design,”
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
, pp. 0–0, 2010, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/36248.