Preparation and characterization of silicon thin films

Download
028624.pdf
1993
Atılgan, İsmail
Show full item record
139
views
0
downloads
Thin films, Silicon
https://hdl.handle.net/11511/889
Graduate School of Natural and Applied Sciences, Thesis

Suggestions

Preparation and electrical structural optical characterization of InSe thin films
Parlak, Mehmet; Erçelebi, Ayşe Çiğdem; Department of Physics (1997)
Fabrication and doping of thin crystalline Si films prepared by e-beam evaporation on glass substrate
Sedani, Salar Habibpur; Turan, Raşit; Ünalan, Hüsnü Emrah; Department of Micro and Nanotechnology (2013)
In this thesis study, fabrication and doping of silicon thin films prepared by electron beam evaporation equipped with effusion cells for solar cell applications have been investigated. Thin film amorphous Si (a-Si) layers have been fabricated by the electron beam evaporator and simultaneously doped with boron (B) and phosphorous (P) using effusion cells. Samples were prepared on glass substrates for the future solar cell operations. Following the deposition of a-Si thin film, crystallization of the films h...
Mechanism and characterization studies on boron carbides deposited by chemical vapor deposition technique
Karaman, Mustafa; Özbelge, Hilmi Önder; Sezgi, Naime Aslı; Doğu, Timur (2005-12-02)
Boron carbide was produced in an impinging jet CVD reactor from a gas mixture of BCl3, CH4 and H-2. The mass transfer limitations on the reaction kinetics were minimised by the jet impingement on the substrate surface. XPS characterization of the produced deposits revealed a nearly pure boron carbide phase containing small amounts of oxy-boron and oxy-carbon species. After a detailed kinetic study, a reaction model was proposed to predict the rates of boron carbide and dichloroborane formation reactions. In...
Investigation of the electromagnetic properties of single walled carbon nanotube thin films
Küçükyıldız, Şeyda; Dericioğlu, Arcan Fehmi; Ünalan, Hüsnü Emrah; Department of Metallurgical and Materials Engineering (2013)
The work presented in this thesis can be divided in two parts. First part discusses the dispersion and deposition routes of single walled carbon nanotube (SWNT) thin films. Two different types of SWNTs and several dispersing agents were examined to achieve a homogeneous SWNT solution. A tip-sonicator and an ultrasonic bath was compared and it has been found that tip-sonicator increases the efficiency of SWNT dispersions. Vacuum filtration and spray coating techniques were utilized for the deposition of SWNT...
Investigation of perfluoropentacene thin films on substrates with different chemical structures
Yavuz, Adem; Danışman, M. Fatih.; Department of Micro and Nanotechnology (2020)
Due to their promising properties in electronic device applications, organic semiconductors (OSs) are being studied heavily. In this study, we aimed to investigate the structural properties of PerFluoroPentacene (PFP) thin films on flat and vicinal Au(111), and Ag(111) surfaces grown by the Supersonic Beam Deposition(SMBD) technique as a function of film thickness, metal surface step density, the effect of chemical and electronic properties of substrate, molecular flux (deposition rate), and energy during f...
Citation Formats
İ. Atılgan, “Preparation and characterization of silicon thin films,” Ph.D. - Doctoral Program, Middle East Technical University, 1993.
METU IIS - Integrated Information Service open@metu.edu.tr