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Thin-Film PZT based Multi-Channel Acoustic MEMS Transducer for Cochlear Implant Applications
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Date
2021-01-01
Author
Yüksel, Muhammed Berat
Külah, Haluk
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Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
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AuthorThis paper presents a multi-channel acoustic transducer that works within the audible frequency range (250-5500 Hz) and mimics the operation of the cochlea by filtering incoming sound. The transducer is composed of eight thin film piezoelectric cantilever beams with different resonance frequencies. The transducer is well suited to be implanted in middle ear cavity with an active volume of 5 mm × 5 mm × 0.62 mm and mass of 4.8 mg. Resonance frequencies and piezoelectric outputs of the beams are modeled with Finite Element Method (FEM). Vibration experiments showed that the transducer is capable of generating up to 139.36 mVpp under 0.1 g excitation. Test results are consistent with the FEM model on frequency (97%) and output voltage (89%) values. Device was further tested with acoustic excitation on an artificial tympanic membrane and flexible substrate. Under acoustic excitation, 50.7 mVpp output voltage generated under 100 dB Sound Pressure Level (SPL). Output voltages observed in acoustical and mechanical characterizations are the highest values reported to the best of our knowledge. Finally, to assess the feasibility of the transducer in daily sound levels, it was excited with a speech sample and output signal was recovered. Time-domain waveforms of the recorded and recovered signals showed close patterns.
Subject Keywords
Acoustic Transducer
,
Auditory system
,
Cochlear implants
,
Ear
,
Fully Implantable Cochlear Implant
,
MEMS
,
Micromechanical devices
,
Resonant frequency
,
Sensors
,
Thin Film Piezoelectric
,
Transducers
URI
https://hdl.handle.net/11511/95197
Journal
IEEE Sensors Journal
DOI
https://doi.org/10.1109/jsen.2021.3130953
Collections
Department of Electrical and Electronics Engineering, Article
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This thesis presents multi-channel acoustic MEMS transducer that is able to work within the audible frequency range (250-5500 Hz) and mimic the operation of a cochlea by filtering incoming sound. This transducer is composed of eight thin film piezoelectric cantilever beams possessing different resonance frequencies. The transducer is well suited to be implanted in a middle ear cavity with an active volume of 5 x 5 x0.6 mm3 and 4.8 mg. Resonance frequencies and piezoelectric outputs of the beams are modeled ...
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M. B. Yüksel and H. Külah, “Thin-Film PZT based Multi-Channel Acoustic MEMS Transducer for Cochlear Implant Applications,”
IEEE Sensors Journal
, pp. 0–0, 2021, Accessed: 00, 2022. [Online]. Available: https://hdl.handle.net/11511/95197.