OPTIMIZATION AND CHARACTERIZATION OF POLYSILICON FABRICATED BY E-BEAM EVAPORATION FOR PASSIVATING CONTACT SILICON (TOPCON) SOLAR CELLS

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Salar H Sedani FBE-Thesis - PhD.pdf

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2022-9-05

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Sedani, Salar Habibpur

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Carrier selective passivating contacts have permitted higher conversion efficiencies by decreasing minority carrier recombination velocities at c-Si/metal contact surfaces. Pioneers of photovoltaics (PV) are investigating the remarkable passivation properties of doped polysilicon (poly-Si) layers over silicon oxide (SiOx). Photovoltaic industry experts are predicting a bright future for poly-Si/SiOx structures (TOPCon), as the future of the PV industry. It is possible to minimize the cost of poly-Si layer deposition by using e-beam evaporation equipped with effusion cells (e-Beam EC), even if Chemical Vapor Deposition (CVD) methods such as plasma-enhanced chemical vapor deposition (PECVD) and low-pressure chemical vapor deposition (LPCVD) are available. The e-beam EC technology also eliminates the use of hazardous process gases, such as PH3 and B2H6, from the manufacturing process. Passivating contact applications were investigated using e-beam-deposited p-type a-Si layers, while low temperature PECVD was used to deposit the n-type a-Si layer on the opposite side. We investigate the impact of boron and phosphorous dopant crystallization temperatures on doping activation. This layer of p-a-Si, which is non-hydrogenated, is ideal for low temperature activation of boron doping in the absence of boron-hydrogen complexes. Ultimately, blister-free p-poly and n-poly layers develop concurrently on both sides of the cell. Additional hydrogenation steps and ITO deposition heal the defects of the non-hydrogenated passivating contacts. As a result of this study, we fabricate bifacial TOPCon cells which reach an efficiency of 17.7% on the p-poly side and 20.2% on the n-poly side.

Subject Keywords

Passivating Contact Solar Cells (TOPCon), e-Beam Evaporation with Effusion Cell (e-Beam EC), PECVD, Polysilicon Defects, Crystallization

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https://hdl.handle.net/11511/99778

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Graduate School of Natural and Applied Sciences, Thesis

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Citation Formats

S. H. Sedani, “OPTIMIZATION AND CHARACTERIZATION OF POLYSILICON FABRICATED BY E-BEAM EVAPORATION FOR PASSIVATING CONTACT SILICON (TOPCON) SOLAR CELLS,” Ph.D. - Doctoral Program, Middle East Technical University, 2022.