Show/Hide Menu
Hide/Show Apps
Logout
Türkçe
Türkçe
Search
Search
Login
Login
OpenMETU
OpenMETU
About
About
Open Science Policy
Open Science Policy
Open Access Guideline
Open Access Guideline
Postgraduate Thesis Guideline
Postgraduate Thesis Guideline
Communities & Collections
Communities & Collections
Help
Help
Frequently Asked Questions
Frequently Asked Questions
Guides
Guides
Thesis submission
Thesis submission
MS without thesis term project submission
MS without thesis term project submission
Publication submission with DOI
Publication submission with DOI
Publication submission
Publication submission
Supporting Information
Supporting Information
General Information
General Information
Copyright, Embargo and License
Copyright, Embargo and License
Contact us
Contact us
A Digitally Controlled FM MEMS Gyroscope System
Download
PhD_Thesis_A DIGITALLY CONTROLLED FM MEMS GYROSCOPE SYSTEM.pdf
Date
2023-1-24
Author
Yeşil, Ferhat
Metadata
Show full item record
This work is licensed under a
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
.
Item Usage Stats
380
views
0
downloads
Cite This
This dissertation presents a digitally controlled high performance FM MEMS gyroscope system with improved short and long term stability for tactical and near navigation grade applications. The digital gyroscope system has a number of advantages such as simplified electronic hardware, small size, low power, and increased flexibility with software programming for easy configuration for different operation conditions, real-time advanced calibration, and extensive testability. The system is implemented with a low-power microcontroller as opposed to the FM MEMS gyroscope systems implemented with high-power FPGAs in literature, and it is fit into a compact sensor package comparable in the size of the commercial high-performance MEMS gyroscopes so that it can be offered as a commercialized product. The system is developed for a MEMS gyroscope that has a mechanical resonant frequency of about 7.5kHz, which requires digital control loop speeds faster than 75kHz for the 8 implemented digital control loops. These challenging digital control loop speeds are achieved using hardware accelerators and register-level programming methods. The most critical digital control loop is the PLL loop that is used for frequency reading of the FM output, and this loop is carefully designed for obtaining a measurement bandwidth greater than 100Hz which is necessary for the implementation of the Lissajous FM method to achieve an improved bias instability of the gyroscope. The angular random walk (ARW) performance of the gyroscope is improved significantly by using the Lissajous FM method with an asymmetric MEMS gyroscope for the first time in the literature; as this approach allows to obtain an oscillation amplitude ratio of the first and second resonant modes as high as 2500 (as opposed to values lower than 25 in fully symmetric gyroscope structures) which yields to a record high scale factor of 875Hz/(rad/sec), i.e., two orders of magnitude higher than those reported for the FM MEMS gyroscopes in literature. The performance of the FM MEMS gyroscope system is measured to provide an ARW value of 0.52°/hr/√Hz and bias instability value of 0.2°/hr, demonstrating about 6 times better performance for each value of the best FM MEMS gyroscope system reported in the literature implemented with a high-power and bulky FPGA board.
Subject Keywords
MEMS
,
FM gyroscope
,
MEMS Gyroscope
,
Digital Control
URI
https://hdl.handle.net/11511/102556
Collections
Graduate School of Natural and Applied Sciences, Thesis
Suggestions
OpenMETU
Core
A high performance automatic mode-matched MEMS gyroscope with an improved thermal stability of the scale factor
Sonmezoglu, S.; Alper, S.E.; Akın, Tayfun (2013-06-20)
This paper presents a high performance, automatic mode-matched, single-mass, and fully-decoupled MEMS gyroscope with improved scale factor stability. The mode-matching system automatically achieves and maintains the matching between the drive and sense mode resonance frequencies with the help of dedicated frequency tuning electrodes (FTEs). This method isolates the drive and sense mode frequency response dynamics by keeping the proof mass voltage (V PM ) constant, improving the scale factor stability up to ...
A symmetric surface micromachined gyroscope with decoupled oscillation modes
Alper, Said Emre; Akın, Tayfun (2001-06-14)
This paper reports a new symmetric gyroscope structure that allows not only matched resonant frequencies for the drive and sense vibration modes for better resolution, but also decoupled drive and sense oscillation modes for preventing unstable operation due to mechanical coupling. The symmetry and decoupling features are achieved at the same time with a new suspension beam design. The gyroscope structure is designed using a standard three-layer polysilicon surface micromachining process (MUMPs) and simulat...
AN IN-PLANE MEMS GYROSCOPE WITH ADJUSTABLE SENSITIVE AXIS
Beşcan, Batuhan; Azgın, Kıvanç; Department of Mechanical Engineering (2021-12-7)
This thesis presents the design, fabrication, and test steps of a gyroscope that can perform the maytagging and carouseling without the need for a rotary platform. The sensor has two orthogonal, decoupled, and identical drive axes connected to the same proof mass, and there is a sense axis orthogonal to both of these drive axes. The drive axes can be driven independently; hence, the motion path of the proof mass can be adjusted by adjusting the frequencies, amplitudes and phases of the driving signals. Thus...
High-performance readout circuit for resonator-based MEMS accelerometer using digital control loop
Ali, Muhammad; Akın, Tayfun; Department of Electrical and Electronics Engineering (2022-11)
This study proposes a new digital control loop-based compact readout circuit for a resonant MEMS accelerometer providing high performance with reduced temperature and power supply dependence while utilizing low processing power. The readout circuit utilizes a charge-sensing pre-amplifier stage that converts the small motional current to readable voltage, which is then converted to the digital domain using a 16-bit ADC to perform the amplitude and frequency extraction in the digital domain. A Proportional In...
AN AUTOMATIC ACCELERATION COMPENSATION SYSTEM FOR A SINGLE-MASS MEMS GYROSCOPE
Gavcar, H. D.; Azgın, Kıvanç; Alper, S. E.; Akın, Tayfun (2015-06-25)
This paper presents the architecture and experimental verification of an automatic acceleration compensation system applied to a single-mass MEMS gyroscope. The proposed method eliminates low frequency proof mass motion of the gyroscope due to external accelerations, suppressing the g-sensitivity of the gyroscope bias up to 12 times. This is achieved by dedicated acceleration cancellation electrodes ( ACEs) for the first time in the literature, eliminating any degradation of the sensor bias stability and no...
Citation Formats
IEEE
ACM
APA
CHICAGO
MLA
BibTeX
F. Yeşil, “A Digitally Controlled FM MEMS Gyroscope System,” Ph.D. - Doctoral Program, Middle East Technical University, 2023.