AN AUTOMATIC ACCELERATION COMPENSATION SYSTEM FOR A SINGLE-MASS MEMS GYROSCOPE

Date

2015-06-25

Author

Gavcar, H. D.
Azgın, Kıvanç
Alper, S. E.
Akın, Tayfun

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

153
views

0
downloads

This paper presents the architecture and experimental verification of an automatic acceleration compensation system applied to a single-mass MEMS gyroscope. The proposed method eliminates low frequency proof mass motion of the gyroscope due to external accelerations, suppressing the g-sensitivity of the gyroscope bias up to 12 times. This is achieved by dedicated acceleration cancellation electrodes ( ACEs) for the first time in the literature, eliminating any degradation of the sensor bias stability and noise performance during the compensation process. The method is also verified to improve the scale factor nonlinearity from 2700ppm to 1800ppm for +/-600 degrees/s range, and for centrifugal accelerations as high as 0.5g.

Subject Keywords

MEMS gyroscope, Gyroscope, G-sensitivity, Acceleration sensitivity compensation

URI

https://hdl.handle.net/11511/55895

Conference Name

18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Collections

Department of Mechanical Engineering, Conference / Seminar

Suggestions

OpenMETU
Core

A high performance automatic mode-matched MEMS gyroscope with an improved thermal stability of the scale factor Sonmezoglu, S.; Alper, S.E.; Akın, Tayfun (2013-06-20) This paper presents a high performance, automatic mode-matched, single-mass, and fully-decoupled MEMS gyroscope with improved scale factor stability. The mode-matching system automatically achieves and maintains the matching between the drive and sense mode resonance frequencies with the help of dedicated frequency tuning electrodes (FTEs). This method isolates the drive and sense mode frequency response dynamics by keeping the proof mass voltage (V PM ) constant, improving the scale factor stability up to ...
A low-drift silicon MEMS resonant accelerometer Gavcar, Hasan Doğan; Akın, Tayfun; Department of Electrical and Electronics Engineering (2023-1-23) This thesis presents the design, fabrication, and experimental verification of low temperature drift silicon resonant accelerometers for tactical grade applications. The working principle of a silicon resonant accelerometer is based on force sensing, in which the sensor output is a frequency proportional to the input acceleration. The stress-insensitive sensor design prevents the thermal stress produced by the mismatch of the thermal expansion coefficients (CTE) of glass and silicon from transmitting to the...
A Digitally Controlled FM MEMS Gyroscope System Yeşil, Ferhat; Akın, Tayfun; Department of Electrical and Electronics Engineering (2023-1-24) This dissertation presents a digitally controlled high performance FM MEMS gyroscope system with improved short and long term stability for tactical and near navigation grade applications. The digital gyroscope system has a number of advantages such as simplified electronic hardware, small size, low power, and increased flexibility with software programming for easy configuration for different operation conditions, real-time advanced calibration, and extensive testability. The system is implemented with a l...
AN IN-PLANE MEMS GYROSCOPE WITH ADJUSTABLE SENSITIVE AXIS Beşcan, Batuhan; Azgın, Kıvanç; Department of Mechanical Engineering (2021-12-7) This thesis presents the design, fabrication, and test steps of a gyroscope that can perform the maytagging and carouseling without the need for a rotary platform. The sensor has two orthogonal, decoupled, and identical drive axes connected to the same proof mass, and there is a sense axis orthogonal to both of these drive axes. The drive axes can be driven independently; hence, the motion path of the proof mass can be adjusted by adjusting the frequencies, amplitudes and phases of the driving signals. Thus...
Compensation of Temperature and Acceleration effects on MEMS Gyroscope Ali, Muhammad (2016-01-16) This paper shows temperature and acceleration effects on Micro-Electro-Mechanical-Systems (MEMS) gyroscope and a practical solution is presented to mitigate effect of these errors using different methods (Polynomial Curve fitting and Neural Networks). Compensation is performed on the output bias drift data acquired from different MEMS gyroscopes. Performance of compensation techniques is also presented in this study. This paper presents novelty of integrated compensation for both factors (temperature and ac...

Citation Formats

H. D. Gavcar, K. Azgın, S. E. Alper, and T. Akın, “AN AUTOMATIC ACCELERATION COMPENSATION SYSTEM FOR A SINGLE-MASS MEMS GYROSCOPE,” presented at the 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, 2015, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/55895.