A high performance automatic mode-matched MEMS gyroscope with an improved thermal stability of the scale factor

Date

2013-06-20

Author

Sonmezoglu, S.
Alper, S.E.
Akın, Tayfun

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This paper presents a high performance, automatic mode-matched, single-mass, and fully-decoupled MEMS gyroscope with improved scale factor stability. The mode-matching system automatically achieves and maintains the matching between the drive and sense mode resonance frequencies with the help of dedicated frequency tuning electrodes (FTEs). This method isolates the drive and sense mode frequency response dynamics by keeping the proof mass voltage (V PM ) constant, improving the scale factor stability up to 4.4 times in a temperature range from -20°C to +80°C while maintaining a wide rate bandwidth (above 50 Hz). The presented gyroscope also achieves a very low bias instability of 0.73°/hr and an angle random walk (ARW) of 0.024°/√hr.

Subject Keywords

MEMS gyroscope, Gyroscope, Mode-matching, Scale factor temperature stability

URI

https://hdl.handle.net/11511/45721

DOI

https://doi.org/10.1109/transducers.2013.6627318

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

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Citation Formats

S. Sonmezoglu, S. E. Alper, and T. Akın, “A high performance automatic mode-matched MEMS gyroscope with an improved thermal stability of the scale factor,” 2013, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/45721.