A high performance automatic mode-matched MEMS gyroscope with an improved thermal stability of the scale factor

2013-06-20
Sonmezoglu, S.
Alper, S.E.
Akın, Tayfun
This paper presents a high performance, automatic mode-matched, single-mass, and fully-decoupled MEMS gyroscope with improved scale factor stability. The mode-matching system automatically achieves and maintains the matching between the drive and sense mode resonance frequencies with the help of dedicated frequency tuning electrodes (FTEs). This method isolates the drive and sense mode frequency response dynamics by keeping the proof mass voltage (V PM ) constant, improving the scale factor stability up to 4.4 times in a temperature range from -20°C to +80°C while maintaining a wide rate bandwidth (above 50 Hz). The presented gyroscope also achieves a very low bias instability of 0.73°/hr and an angle random walk (ARW) of 0.024°/√hr.

Suggestions

AN AUTOMATIC ACCELERATION COMPENSATION SYSTEM FOR A SINGLE-MASS MEMS GYROSCOPE
Gavcar, H. D.; Azgın, Kıvanç; Alper, S. E.; Akın, Tayfun (2015-06-25)
This paper presents the architecture and experimental verification of an automatic acceleration compensation system applied to a single-mass MEMS gyroscope. The proposed method eliminates low frequency proof mass motion of the gyroscope due to external accelerations, suppressing the g-sensitivity of the gyroscope bias up to 12 times. This is achieved by dedicated acceleration cancellation electrodes ( ACEs) for the first time in the literature, eliminating any degradation of the sensor bias stability and no...
A symmetric surface micromachined gyroscope with decoupled oscillation modes
Alper, Said Emre; Akın, Tayfun (2001-06-14)
This paper reports a new symmetric gyroscope structure that allows not only matched resonant frequencies for the drive and sense vibration modes for better resolution, but also decoupled drive and sense oscillation modes for preventing unstable operation due to mechanical coupling. The symmetry and decoupling features are achieved at the same time with a new suspension beam design. The gyroscope structure is designed using a standard three-layer polysilicon surface micromachining process (MUMPs) and simulat...
A high-performance silicon-on-insulator MEMS gyroscope operating at atmospheric pressure
Alper, Said Emre; Azgın, Kıvanç; Akın, Tayfun (Elsevier BV, 2007-03-30)
This paper presents a new, high-performance silicon-on-insulator (SOI) MEMS gyroscope with decoupled oscillation modes. The gyroscope structure allows it to achieve matched-resonance-frequencies, large drive-mode oscillation amplitude, high sense-mode quality factor, and low mechanical cross-talk. The gyroscope is fabricated through the commercially available SOIMUMPS process of MEMSCAP Inc. The fabricated gyroscope has minimum capacitive sense gaps of 2.6 mu m and a structural silicon thickness of 25 mu m,...
AN AUTOMATIC MODE MATCHING SYSTEM FOR A HIGH Q-FACTOR MEMS GYROSCOPE USING A DECOUPLED PERTURBATION SIGNAL
Yesil, F.; Alper, S. E.; Akın, Tayfun (2015-06-25)
This paper reports a closed-loop controller system developed for in-run automatic matching of the drive and sense mode resonance frequencies of a MEMS gyroscope with a high quality factor (Q). This is achieved by injecting a perturbation signal to the quadrature cancellation loop, while keeping it decoupled from the angular rate control loop. The new controller is implemented in a CMOS ASIC together with the other sensor control loops, and it is verified to maintain matched-mode state under changing environ...
A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate
Alper, Said Emre; Akın, Tayfun (2005-08-01)
This paper presents a single-crystal silicon symmetrical and decoupled (SYMDEC) gyroscope implemented using the dissolved wafer microelectromechanical systems (MEMS) process on an insulating substrate. The symmetric structure allows matched resonant frequencies for the drive and sense vibration modes for high-rate sensitivity and low temperature-dependent drift, while the decoupled drive and sense modes prevents unstable operation due to mechanical coupling, achieving low bias-drift. The 12-15-mu m-thick si...
Citation Formats
S. Sonmezoglu, S. E. Alper, and T. Akın, “A high performance automatic mode-matched MEMS gyroscope with an improved thermal stability of the scale factor,” 2013, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/45721.