Ellipsometric and uv-vis transmittance analysis of amorphous silicon carbide thin films

Download

index.pdf

Date

2004

Author

Gülses, Ali Alkan

Metadata

Show full item record

Item Usage Stats

128
views

65
downloads

The fundamentals of the ellipsometry are reviewed in order to point out the strengths and weaknesses of the ellipsometric measurements. The effects of the surface conditions (such as degree of cleanliness, contaminated thin layer, roughness etc_) on the ellipsometric variables are experimentally studied; the optimum procedures have been determined. Hydrogenated amorphous silicon carbide (a-Si1-xCx:H) thin films are produced by plasma enhanced chemical vapor deposition (PECVD) technique with a circular reactor, in a way that RF power and carbon contents are taken as variables. These samples are analyzed using multiple angle of incidence ellipsometer and uv-vis spectrometer. These measurements have inhomogeneities in optical constants, such as thicknesses, refractive indices and optical energy gaps along the radial direction of the reactor electrode for different power and carbon contents.

Subject Keywords

Physics.

URI

http://etd.lib.metu.edu.tr/upload/12605589/index.pdf
https://hdl.handle.net/11511/14853

Collections

Graduate School of Natural and Applied Sciences, Thesis

Suggestions

OpenMETU
Core

Gödel's metric and its generalization Özgören, Kıvanç; Karasu, Atalay; Department of Physics (2005) In this thesis, firstly the original Gödel's metric is examined in detail. Then a more general class of Gödel-type metrics is introduced. It is shown that they are the solutions of Einstein field equations with a physically acceptable matter distribution provided that some conditions are satisfied. Lastly, some examples of the Gödel-type metrics are given.
The red noise power density estimation techniques and application to the source sax j2103.5+4545 Erkoca, Arif Emre; Baykal, Altan; Department of Physics (2004) In this thesis,red noise analysis techniques are presented. The necessity of the use of the window functions and the Deeter polynomial method in order to determine red noise is discussed. The method was applied to the source SAX J2103.5+4545 which showed a white torque noise with a relatively low noise strength due to its being a transient system.
Measurement of tau polarization in W -> tau nu decays with the ATLAS detector in pp collisions at root s=7 TeV Aad, G.; et. al. (2012-07-01) In this paper, a measurement of tau polarization in W -> tau nu decays is presented. It is measured from the energies of the decay products in hadronic tau decays with a single final state charged particle. The data, corresponding to an integrated luminosity of 24 pb(-1), were collected by the ATLAS experiment at the Large Hadron Collider in 2010. The measured value of the tau polarization is P-tau = -1.06 +/- 0.04 (stat)(-0.07)(+0.05) (syst), in agreement with the Standard Model prediction, and is consiste...
Mems gyroscopes for tactical-grade inertial measurement applications Alper, Said Emre; Akın, Tayfun; Department of Electrical and Electronics Engineering (2005) This thesis reports the development of high-performance symmetric and decoupled micromachined gyroscopes for tactical-grade inertial measurement applications. The symmetric structure allows easy matching of the resonance frequencies of the drive and sense modes of the gyroscopes for achieving high angular rate sensitivity; while the decoupled drive and sense modes minimizes mechanical cross-coupling for low-noise and stable operation. Three different and new symmetric and decoupled gyroscope structures with...
Kaluza-klein reduction of higher curvature gravity models Kuyrukcu, Halil; Başkal, Sibel; Department of Physics (2010) The standard Kaluza-Klein theory is reviewed and its basic equations are rewritten in an anholonomic basis. A five dimensional Yang-Mills type quadratic and cubic curvature gravity model is introduced. By employing the Palatini variational principle, the field equations and the stress-energy tensors of these models are presented. Unification of gravity with electromagnetism is achieved through the Kaluza-Klein reduction mechanism. Reduced curvature invariants,field equations and stress-energy tensors in fou...

Citation Formats

A. A. Gülses, “Ellipsometric and uv-vis transmittance analysis of amorphous silicon carbide thin films,” M.S. - Master of Science, Middle East Technical University, 2004.