Mems gyroscopes for tactical-grade inertial measurement applications

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2005

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Alper, Said Emre

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This thesis reports the development of high-performance symmetric and decoupled micromachined gyroscopes for tactical-grade inertial measurement applications. The symmetric structure allows easy matching of the resonance frequencies of the drive and sense modes of the gyroscopes for achieving high angular rate sensitivity; while the decoupled drive and sense modes minimizes mechanical cross-coupling for low-noise and stable operation. Three different and new symmetric and decoupled gyroscope structures with unique features are presented. These structures are fabricated in four different micromachining processes: nickel electroforming (NE), dissolved-wafer silicon micromachining (DWSM), silicon-on-insulator (SOI) micromachining, and silicon-on-glass (SOG) micromachining. The fabricated gyroscopes have capacitive gaps from 1.5æm to 5.5æm and structural layer thicknesses from 12æm to 100æm, yielding aspect ratios up to 20 depending on the fabrication process. The size of fabricated gyroscope chips varies from 1x1mm2 up to 4.2x4.6mm2. Fabricated gyroscopes are hybrid-connected to a designed capacitive interface circuit, fabricated in a standard 0.6æm CMOS process. They have resonance frequencies as small as 2kHz and as large as 40kHz; sense-mode resonance frequencies can be electrostatically tuned to the drive-mode frequency by DC voltages less than 16V. The quality factors reach to 500 at atmospheric pressure and exceed 10,000 for the silicon gyroscopes at vacuum. The parasitic capacitance of the gyroscopes on glass substrates is measured to be as small as 120fF. The gyroscope and interface assemblies are then combined with electronic control and feedback circuits constructed with off-the-shelf IC components to perform angular rate measurements. Measured angular rate sensitivities are in the range from 12æV/(deg/sec) to 180æV/(deg/sec), at atmospheric pressure. The SOI

Subject Keywords

Physics.

URI

http://etd.lib.metu.edu.tr/upload/12606483/index.pdf
https://hdl.handle.net/11511/15347

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Graduate School of Natural and Applied Sciences, Thesis

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Citation Formats

S. E. Alper, “Mems gyroscopes for tactical-grade inertial measurement applications,” Ph.D. - Doctoral Program, Middle East Technical University, 2005.