Dynamic resistivity behavior of thin oxide based multilayer thin films under reducing conditions

Kurbanoğlu, Başak
Effects of urban air pollution on health and environment have lead researchers to find economic air quality monitoring regulations. Since tin dioxide (SnO2) was demonstrated as a gas sensing device in 1962, tin oxide based thin film sensors have been widely studied due to their high sensitivity and fast response. The main advantages of using tin oxide sensors are their low cost, small size and low power consumption for mobile system applications. But, in order SnO2 based sensors to meet low concentration of gases they should be highly upgraded in sensitivity, selectivity and stability. This study was focused on the capacity of dopants in the SnO2 layer to increase the sensitivity of the sensor in detecting carbon monoxide. 1 wt. % Pd promoted and 0.1 wt. % Na-1 % Pd promoted SnO2 multilayer thin films were produced by sol-gel technique followed by spin coating route on soda-lime glass substrates. The EDX and SEM studies showed the surface composition and the surface structure is homogeneous throughout the films. The film thickness was determined app. 450 nm from the SEM image of the cross-section, after coating 8 layers. The experiments conducted at several temperatures namely 150, 175 and 200oC, in oxygen free and 1% oxygen containing atmospheres showed that the responses at higher temperatures in the presence of oxygen were much sharper with respect to others. Besides, Na promoted test sensors showed larger responses with shorter response time in oxygen free atmospheres at relatively lower temperatures. The results showed that the sensor signal is not directly correlated with the carbon dioxide production in oxygen free atmospheres.
Citation Formats
B. Kurbanoğlu, “Dynamic resistivity behavior of thin oxide based multilayer thin films under reducing conditions,” M.S. - Master of Science, Middle East Technical University, 2006.