Silicon micromachined capacitive pressure sensors for industrial and biomedical applications

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075890.pdf
1998
Akar, Orhan Şevket
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https://hdl.handle.net/11511/1615
Graduate School of Natural and Applied Sciences, Thesis

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Citation Formats
O. Ş. Akar, “Silicon micromachined capacitive pressure sensors for industrial and biomedical applications,” Middle East Technical University, 1998.
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