Vanadium oxide (VOx) thin films elaborated by sol-gel method for microbolometer applications

Download

index.pdf

Date

2012

Author

Karslı, Kadir

Metadata

Show full item record

Item Usage Stats

334
views

171
downloads

Infrared detector technologies have been developing each day. Thermal detectors take great attention in commercial applications due to their low power consumption and low costs. The active material selection and the deposition of the material are highly important performance effective factors for microbolometer detector applications. In that sense, developing vanadium oxide (VOx) microbolometer active material by sol-gel method might be feasible approach to achieve good performance microbolometer detectors. In this study, vanadium oxide thin films are prepared by sol-gel method is deposited on silicon or silicon nitride wafers as active material by spin coating. The films are annealed under different hydrogen concentration of H2/N2 environments at 410 C for various hours to obtain desired oxygen phases of vanadium oxide thin films. After appropriate annealing step, V2O5 structured thin films are reduced to mixture of lower oxygen states of vanadium oxide thin films which contains V2O5, V6O13, and VO2. Finally, the performance parameters such as sheet resistance, TCR, and noise are measured to verify the quality of the developed vanadium oxide active layers for their use in microbolometers. The sheet resistances are in the range of 100 kΩ/sqr – 200 kΩ/sqr. The resistances are reasonable values around 100 kΩ under 20 µA bias, and the TCR values of the samples measured around 2%/C at room temperature (25 C). The measured noise of the films is higher than expected values, and the corner frequencies are more than 100 kHz. The results of the measurements show that it is possible to use sol-gel deposited vanadium oxide as a microbolometer active material after improving the noise properties of the material.

Subject Keywords

Electrical Engineering., Nuclear Engineering.

URI

http://etd.lib.metu.edu.tr/upload/12614078/index.pdf
https://hdl.handle.net/11511/21289

Collections

Graduate School of Natural and Applied Sciences, Thesis

Suggestions

OpenMETU
Core

Lifetime analysis for wireless sensor networks Öğünlü, Bilal; Bazlamaçcı, Cüneyt Fehmi; Department of Electrical and Electronics Engineering (2004) Sensor technologies are vital today in gathering information about certain environments and wireless sensor networks are getting more widespread use everyday. These networks are characterized by a number of sensor nodes deployed in the field for the observation of some phenomena. Due to the limited battery capacity in sensor nodes, energy efficiency is a major and challenging problem in such power-constrained networks. Some of the network design parameters have a direct impact on the network̕s lifetime. The...
Localization in underwater acoustic sensor networks Işık, Mehmet Talha; Akan, Özgür Barış; Department of Electrical and Electronics Engineering (2007) Underwater Acoustic Sensor Networks (UW-ASNs) have the potential to enable many applications such as environmental monitoring, undersea exploration and distributed tactical surveillance. In order to realize the potential gains of these applications, it is essential that the sensor nodes can be accurately located in a three dimensional underwater sensor network topology. Although many localization protocols have been proposed recently for terrestrial sensor networks, the unique characteristics of the underwa...
Advanced readout and control electronics for mems gyroscopes Temiz, Yüksel; Akın, Tayfun; Department of Electrical and Electronics Engineering (2007) This thesis reports the development of advanced readout and control electronics for MEMS gyroscopes developed at METU. These gyroscope electronics are separated into three main groups: high sensitive interface circuits, drive mode amplitude controlled self oscillation loops, and sense mode phase sensitive amplitude demodulators. The proposed circuits are first implemented with discrete components, and then integrated on CMOS chips. A self oscillation loop enabling constant amplitude drive mode vibrations in...
Detection of airport runways in optical satellite images Zöngür, Uğur; Ulusoy, İlkay; Department of Electrical and Electronics Engineering (2009) Advances in hardware and pattern recognition techniques, along with the widespread utilization of remote sensing satellites, have urged the development of automatic target detection systems. Automatic detection of airports is particularly essential, due to the strategic importance of these targets. In this thesis, a detection method is proposed for airport runways, which is the most distinguishing element of an airport. This method, which operates on large optical satellite images, is composed of a segmenta...
Dual and single color mid-wavelength infrared quantum well photodetectors Kaldırım, Melih; Beşikci, Cengiz; Department of Electrical and Electronics Engineering (2008) Quantum Well Infrared Photodetector (QWIP) technology is promising for the development of large format low cost single and dual/multi color infrared sensor arrays. Thanks to the mature III-V semiconductor technology, QWIP focal plane arrays (FPAs) provide high uniformity and excellent noise equivalent temperature difference (NETD) in both long wavelength infrared (LWIR 8-12 m) and mid wavelength infrared (MWIR 3-5 m) bands. This thesis work focuses on the development of large format single and dual color MW...

Citation Formats

K. Karslı, “Vanadium oxide (VOx) thin films elaborated by sol-gel method for microbolometer applications,” M.S. - Master of Science, Middle East Technical University, 2012.