Effect of deposition parameters on silicon layers transition from amorphous phase to micro/nano-crystalline phase in different deposition techniques

Download

index.pdf

Date

2013

Author

Nogay, Gizem

Metadata

Show full item record

Item Usage Stats

156
views

105
downloads

Hydrogenated nano/micro-cystalline silicon (nc-/c-Si:H) thin films are the key materials for Si-based thin film solar cell technology. These films have attracted great attention due to their applications in thin film solar cells. Silicon phase transition from amorphous to nano/micro-crystalline phase is an important phenomenon, especially in progress of Si thin film tandem structured solar cells. It is well-accepted fact that the development of deposition phase diagrams allows phase engineering for systematic improvement of materials and cell structures. In this thesis, crystallization dynamics of the amorphous silicon prepared via different deposition techniques such as magnetron sputtering, electron beam evaporation, CCP-assisted CVD and ICP-assisted CVD have been investigated. The advantages and disadvantages of these production methods have been debated by considering different aspects such as cost efficiency, film uniformity, deposition rate and applicability. For each technique, different deposition parameters such as deposition power, pressure, coating duration, substrate temperature, and source gas dilution were investigated comprehensively. Deposited films were analyzed in structural, morphological, optical and electrical features. Films are deposited on different substrate such as glass, quartz and Si-wafer and basic diagnostic tools like Raman Spectroscopy (RS), Grazing Incidence X-Ray Diffraction (GR-XRD), X-Ray Photoelectron Spectroscopy (XPS), Spectroscopic Ellipsometry (SE), Fourier Transform Infra-Red Spectroscopy (FTIR), Scanning Electron Microscopy (SEM), High Resolution Transmission Electron Microscopy (HRTEM) are used as complementary methods. Crystalline volume fraction calculated by RS is assumed as the key parameter while defining the structural transition. At the end of this research, general knowledge about the crystallization parameters for different chemical and physical vapor deposition techniques was obtained. .

Subject Keywords

Plasma-enhanced chemical vapor deposition., Silicon, Crystallization., Raman spectroscopy., Inductively coupled plasma spectrometry.

URI

http://etd.lib.metu.edu.tr/upload/12616176/index.pdf
https://hdl.handle.net/11511/22778

Collections

Graduate School of Natural and Applied Sciences, Thesis

Suggestions

OpenMETU
Core

Gamma-ray spectroscopy and multipolarity measurements of the proton-rich nucleus ⁹ₑRu Aktaş, Özge; Yılmaz, Osman; Ataç Nyberg, Ayşe; Department of Physics (2013) Hydrogenated nano/micro-cystalline silicon (nc-/c-Si:H) thin films are the key materials for Si-based thin film solar cell technology. These films have attracted great attention due to their applications in thin film solar cells. Silicon phase transition from amorphous to nano/micro-crystalline phase is an important phenomenon, especially in progress of Si thin film tandem structured solar cells. It is well-accepted fact that the development of deposition phase diagrams allows phase engineering for systema...
Effect of Laser Wavelength on AZO Surface Texturing by Direct Laser Processing / Patterning for Thin-Film Silicon Solar Cells Applications Demircioğlu, Zeynep; Nasser, Hisham; Balog, Robert S.; Turan, Raşit (2018-01-01) Surface texturing of transparent conductive oxides is crucial to improve the fraction of incident light trapped in the absorber layer of thin film silicon based solar cells to improve the device performance. In this work, we fabricate and compare periodic, overlapping, and random surface textures and patterns on aluminium doped zinc oxide (AZO) using direct laser processing. The effects of the used laser wavelength, laser operating frequency, and pulse periodicity on the structural, morphological, and optic...
Effects of tail states on the conduction mechanisms in silicon carbide thin films with high carbon content SEL, KIVANÇ; AKAOĞLU, BARIŞ; Atilgan, Ismail; Katircioglu, Bayram (Elsevier BV, 2011-03-01) Hydrogenated amorphous silicon carbide (a-SiCx:H) films of different carbon content (x) were deposited by radio frequency plasma enhanced chemical vapor deposition (PECVD) system. Apart from the X-ray photoelectron spectroscopy (XPS) and UV-Visible transmission analyses, the resistivity measurements between 293 K and 450 K were emphasized to assess the eventual transport mechanisms. The film resistivities are unexpectedly found relatively low, especially for high carbon content. In the frame of exclusive ba...
Effect of CNT impregnation on the mechanical and thermal properties of C/C-SiC composites Tulbez, Simge; ESEN, ZİYA; Dericioğlu, Arcan Fehmi (2020-06-01) The present study investigates the effect of additional carbon source, in the form of carbon nanotubes (CNTs), on mechanical and thermal properties of carbon fiber reinforced silicon carbide (C/C-SiC) ceramic matrix composites (CMC) produced by liquid silicon infiltration (LSI) technique. The CNTs used in this study were impregnated into the C/C preforms before the liquid silicon infiltration stage. The results showed that the addition of excess carbon to the C/C preforms in the form of CNTs enhanced Si inf...
Effects of Graphene Transfer and Thermal Annealing on Anticorrosive Properties of Stainless Steel Oh, Jeong Hyeon; Han, Sangmok; Kim, Tae-Yoon; PARK, JONGEE; Öztürk, Abdullah; Kim, Soo Young (2017-11-01) Stainless steel (STS) films were annealed in a thermal quartz tube and covered with graphene to improve their anticorrosive properties. Graphene was synthesized via the chemical vapor deposition method and transferred onto the surface of the STS film by the layer-by-layer approach. The structure of the STS film changed from alpha-Fe to gamma-Fe after annealing at 700 C for 1 h, resulting in an increase of 82.72% in the inhibition efficiency. However, one-layer graphene acted as a conductive pathway and ther...

Citation Formats

G. Nogay, “Effect of deposition parameters on silicon layers transition from amorphous phase to micro/nano-crystalline phase in different deposition techniques,” M.S. - Master of Science, Middle East Technical University, 2013.