Compensation methos for quasi-static acceleration sensitivity of MEMS gyroscopes /

Gavcar, Hasan Doğan
This thesis presents the quasi-static acceleration compensation methods for a fully decoupled MEMS gyroscope. These methods are based on the utilization of the amplitude difference information between the residual quadrature signals on the differential sense mode electrodes to sense the static acceleration acting on the sense mode of the gyroscope. There are three different quasi-static acceleration compensation methods presented in this thesis. In the first method, the static acceleration is measured by comparing the amplitudes of the out of phase sustained residual quadrature signals. By using the experimental relation between the rate and acceleration outputs, the quasi-static acceleration sensitivity of the gyroscope is mitigated. This method requires the additional process of data collection. In the second method, in addition to the circuit proposed in the first method, a closed loop controller is implemented in the acceleration compensation system to suppress the effect of the acceleration. The generated feedback voltage is applied to the sense mode electrodes by using the non-inverting inputs of the sense mode preamplifiers. The advantage of this method compared to the first one is that it does not require any additional data process thanks to the closed loop controller. However, this method cannot completely suppress the quasi-static acceleration of the gyroscope. Moreover, changing the voltage of the non-inverting inputs of the preamplifiers may affect the operation of all other control loops. In the third method, the additional acceleration cancellation electrodes are utilized in the mechanical design of the gyroscope. This method overcomes the problems encountered in the second acceleration compensation method. This study mainly focuses on the third acceleration compensation method which provides the best result. Therefore, a single-mass fully decoupled gyroscope including the dedicated acceleration cancellation electrodes is designed. FEM simulations are performed to determine the mode shapes and mode resonance frequencies of the designed gyroscope. The designed gyroscopes are fabricated using the modified silicon-on-glass (SOG) process and are packaged at the wafer level. The closed loop controllers are designed for the drive amplitude control, force-feedback, quadrature cancellation, and acceleration cancellation loops and are implemented on a printed circuit board (PCB). The acceleration compensation system consisting of vacuum packaged gyroscope and controller modules is populated on the same PCB, and the system level tests are performed. Measurements show that the proposed acceleration compensation system operates as expected. Test results demonstrate that the g-sensitivity of the studied gyroscopes are substantially reduced from 0.31°/s/g to 0.025°/s/g, and the effect of the static acceleration is highly-suppressed up to 12 times with the use of the third compensation method proposed in this work. Moreover, the nonlinearity in the scale factor is improved from 0.53% to 0.36% for +/-600°/s range for centrifugal accelerations as much as 0.5g. Furthermore, the proposed acceleration compensation methods do not deteriorate the bias and noise performances of the gyroscopes. To conclude, the proposed acceleration compensation methods improves the g-sensitivity of MEMS gyroscope by using the control electronics rather than employing complex mechanical design. .


Correction of temperature and acceleration effects on MEMS gyro output signals /
Ali, Muhammad; Akın, Tayfun; Azgın, Kıvanç; Department of Electrical and Electronics Engineering (2014)
The scope of this thesis is to study the effects of temperature and acceleration on a MEMS gyroscope and present a workable solution to compensate these errors using various techniques. Compensation for errors is implemented considering the output bias data of the gyroscope. The study also provides comparison of these various techniques, namely Polynomial Curve fitting and Neural Networks. In addition, Moving Average Filtering is used as an auxiliary technique. The study provides novelty of compensating bot...
Design of a MEMS based hydraulic pressure sensor
Göreke, Utku; Azgın, Kıvanç; Beyaz, Mustafa İlker; Department of Micro and Nanotechnology (2016)
This dissertation presents a novel technique for detection of hydraulic pressure by using a MEMS resonant sensor. Proposed sensor utilizes a double ended tuning fork (DETF) resonator. In the literature tuning forks are used for measurement of the deflection of a diaphragm. However, in this study, a tuning fork is configured to lay in orthogonal direction with a diaphragm of which center point deflection is being measured. Upon application of pressure, center deflection of the diaphragm induces an axial comp...
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Köse, Talha; Azgın, Kıvanç; Akın, Tayfun; Department of Mechanical Engineering (2016)
This thesis presents the design, fabrication and characterization of a high performance, integrated, resonant MEMS temperature sensor, and temperature compensation of a capacitive MEMS accelerometer. Two different double-ended-tuning-fork (DETF) type resonator designs are developed and characterized for temperature sensing. The strain-amplifying beam structure is added to the DETF resonators in order to enhance thermal strain induced on the DETF tines due to the different thermal expansion coefficients of t...
Design of an X-band 3-bit RF MEMS constant phase shifter
Kuzubaşlı, Ahmet; Akın, Tayfun; Demir, Şimşek; Department of Electrical and Electronics Engineering (2016)
This thesis presents a 3-bit 180° constant phase shifter design implementing Co-Planar Waveguide (CPW) and RF MEMS variable capacitors with ±1.8% accuracy at 10 GHz and ±5.8% maximum peak error between 9-11 GHz. The phase shifter with minimum phase errors is determined by considering exemplary circuit simulations of different phase shifter types designed with a novel in-house RF MEMS fabrication process [1] parameters. Due to its wide-band characteristics and CPW compatibility, the selected topology is the ...
Process Development for the Fabrication of a Three Axes Capacitive MEMS Accelerometer
Aydemir, Akin; Akın, Tayfun (2015-09-09)
This paper presents a new approach for the fabrication of a three-axis capacitive MEMS accelerometer that is capable of differentially sensing the acceleration in all three orthogonal axes. For the first time in literature, differential sensing for the out of plane direction is achieved by defining a movable sensing electrode on the structural layer of the SOI wafer that is sandwiched between two stationary electrodes defined on the glass substrate and the handle layer of the SOI wafer enabling the differen...
Citation Formats
H. D. Gavcar, “Compensation methos for quasi-static acceleration sensitivity of MEMS gyroscopes /,” M.S. - Master of Science, Middle East Technical University, 2014.