Process Development for the Fabrication of a Three Axes Capacitive MEMS Accelerometer

Date

2015-09-09

Author

Aydemir, Akin
Akın, Tayfun

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

288
views

0
downloads

This paper presents a new approach for the fabrication of a three-axis capacitive MEMS accelerometer that is capable of differentially sensing the acceleration in all three orthogonal axes. For the first time in literature, differential sensing for the out of plane direction is achieved by defining a movable sensing electrode on the structural layer of the SOI wafer that is sandwiched between two stationary electrodes defined on the glass substrate and the handle layer of the SOI wafer enabling the differential sensing. In this approach, individual lateral and vertical axis accelerometers are fabricated in the same die on an SOI wafer which is anodically bonded to a glass substrate. (C) 2015 The Authors. Published by Elsevier Ltd.

Subject Keywords

Three-axis accelerometer, Out of plane accelerometer, Differential sensing, SOI

URI

https://hdl.handle.net/11511/35562

DOI

https://doi.org/10.1016/j.proeng.2015.08.773

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

Suggestions

OpenMETU
Core

A new design and a fabrication approach to realize a high performance three axes capacitive MEMS accelerometer Aydemir, Akin; Terzioglu, Yunus; Akın, Tayfun (2016-06-15) This paper presents a new fabrication approach and design for a three axis capacitive MEMS accelerometer that is capable of measuring externally applied accelerations in three orthogonal axes. Individual lateral and vertical axis accelerometers are fabricated in the same die on an SOI wafer which is anodically bonded to a glass substrate. Handle layer of the SOI wafer is used as the top electrode for the vertical axis accelerometer. This accelerometer has a 2 mm(2) perforated electrode area anchored to the ...
Fabrication of a Three-Axis Capacitive MEMS Accelerometer on a Single Substrate Aydemir, Akin; Akın, Tayfun (2015-11-04) This paper presents a new fabrication approach and a design for the fabrication of a three-axis capacitive MEMS accelerometer where differential sensing is enabled for all sense directions. In this approach, individual lateral and vertical axis accelerometers are fabricated in the same die on an SOI wafer which is eutectically bonded to a glass substrate. Differential sensing for the vertical axis accelerometer is realized by defining the proof mass of the accelerometer on the structural layer of the SOI wa...
SELF-PACKAGED THREE AXIS CAPACITIVE MEMS ACCELEROMETER Aydemir, Akin; Akın, Tayfun (2020-01-01) This paper presents the design, fabrication, and characterization of a self-packaged three axis capacitive MEMS accelerometer fabricated by using only four masks that is capable of differentially sensing the externally applied accelerations in three orthogonal axes. Individual lateral and vertical axis accelerometers are fabricated in the same die on a SOT wafer, which is eutectically bonded to a silicon substrate. Handle layer of the SOT wafer is both used as the top electrode for the vertical axis acceler...
Fabrication of A Sandwich Type Three Axis Capacitive MEMS Accelerometer Tez, Serdar; Akın, Tayfun (2013-11-06) This paper presents a three axis capacitive MEMS accelerometer including individual lateral and vertical accelerometers in a same die. The three axis capacitive MEMS accelerometer is fabricated by utilizing a glass-silicon-glass multi-stack formed by a fabrication process depending on the double glass modified silicon on glass process (DGM-SOG), where the structural layer is selected to be 35 mu m thick silicon. The fabrication process uses the Au-Si eutectic bonding in the last step of the formation of th...
A single mass two-axis capacitive MEMS accelerometer with force rebalance Köse, Talha; Terzioʇlu, Yunus; Azgın, Kıvanç; Akın, Tayfun (2015-03-26) This paper presents a single mass 2-axis MEMS capacitive accelerometer with a unique force rebalance method achieved with the readout circuit developed for the simultaneous 2-axis acceleration sensing. Using a single mass structure with extra fingers for reading multiple axes allows better sensor performances when compared to multi-axis accelerometers with individual proof masses occupying the same die area. Test results show 274 mV/g scale factor for x-axis, and 280 mV/g scale factor for y-axis, while the ...

Citation Formats

A. Aydemir and T. Akın, “Process Development for the Fabrication of a Three Axes Capacitive MEMS Accelerometer,” 2015, vol. 120, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/35562.