Lateral mode resonators for in liquid biosensing applications with a second harmonic based read out method

Aydın, Eren
This thesis presents design and implementation of lateral mode electrostatic resonators for in liquid biosensing applications and a novel read-out approach for eliminating parasitic feedthrough current and enhance Q of the resonating system at the same time. The main objective of this thesis is to make resonators operating under when the microchannel is filled with liquid. Liquid injection inside the microchannel of resonators brings lots of mechanical and electrical problems together. These problems are categorized as damping and feedthrough current. In the scope of this thesis, new resonators are designed suitable for operation under liquid flow optimizing their damping. Calculations show that all types of the designed resonators have Q higher than 45 on liquid. The designed devices are fabricated using silicon-glass anodic bonding process and coated with 500 nm parylene layer. One type of the tested devices without parylene coating has 590 Q and 330 kHz resonance frequency in air and after parylene coating Q has decreased to 93 and resonance frequency increased to 407 kHz. After liquid injection inside the microchannel Q of the resonator has vi decreased to 54 and the resonance frequency of the resonator has increased to 480 kHz. This is the first time illustration of resonance of a lateral mode electrostatic resonator on liquid without postprocessing. Moreover a new resonance characterization method based on sensing second harmonic component of the resonators is developed. Utilizing this method, feedthrough current is eliminated and resonance peak was increased from 1 dB to 35 dB. Moreover it is shown that this method is suitable for eliminating both capacitive and resistive feedthrough current without using complex resonator design and circuitry. Furthermore this method also improves Q of the resonating system 66%. 


Resonance-based MEMS temperature sensors for temperature compensation of mems capacitive accelerometer
Demirhan, Gülşah; Akın, Tayfun; Department of Electrical and Electronics Engineering (2016)
The idea of the proposed study is using the resonator structure as a temperature sensor together with controller circuitry. That is to say, the study consists of two branches; one is PI controller output which would be used as a temperature sensor and the other is preamplifier output which would be used as carrier generator to the accelerometer readout circuitry. The proposed resonator is analyzed in detail in terms of dynamics, simulation models and theoretical investigations. The implemented resonator is ...
Design and implementation of low leakage MEMS microvalves
Yıldırım, Ender; Külah, Haluk; Arıkan, Mehmet Ali Sahir; Department of Mechanical Engineering (2011)
This thesis presents analysis, design, implementation, and testing of electrostatically actuated MEMS microvalves. The microvalves are specifically designed for lab-on-a-chip applications to achieve leakage ratios below 0.1 at pressure levels in the order of 101 kPa. For this purpose, two different microvalves are presented in the study. In the proposed designs, electrostatic actuation scheme is utilized to operate the microvalves in normally open and normally closed modes. Characterization of normally open...
Low-Cost LWIR-Band CMOS Infrared (CIR) Microbolometers for High Volume Applications
Akın, Tayfun (2020-01-01)
This paper provides an overview of the studies and the current status for the development of a novel, low-cost, and CMOS foundry compatible approach for implementing microbolometers with standard CMOS and simple post-CMOS subtractive MEMS processes. This CMOS infrared detector technology is shortly called as the CMOS IR (CIR) technology, and it can be used to implement Focal Plane Arrays (FPAs) for infrared imaging in the LWIR-band (8-12 mu m wavelength). Post-CMOS processes require only one mask lithograph...
Robot end-effector based sensor integration for tracking moving parts
Konukseven, Erhan İlhan (2000-08-31)
This paper presents a cost-efficient end-effector based infrared proximity sensor integration system and the implementation of fuzzy-logic control algorithm.
A MEMS based drug effect analysis system utilizing droplet microfluidics
Özkan, Metin Dündar; Külah, Haluk; Yıldırım, Ender; Department of Electrical and Electronics Engineering (2018)
This thesis proposes a fully integrated lab-on-a-chip system designed for drug effect analysis based on the droplet microfluidics. It is mainly designed for screening multi-drug responses of cells in an automated operation. The distinguished feature of the drug screening system is that it includes droplet-based single cell encapsulation. The system includes two main subsystems which are parylene-based and normally closed electrostatic microvalves and droplet generation system. The integration of microvalves...
Citation Formats
E. Aydın, “Lateral mode resonators for in liquid biosensing applications with a second harmonic based read out method,” M.S. - Master of Science, Middle East Technical University, 2017.