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Optimization of Mesa Structured InGaAs Based Photodiode Arrays
Date
2017-04-13
Author
Dolas, M. Halit
Çırçır, Kübra
Kocaman, Serdar
Metadata
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We design lattice matched InP/In0.53Ga0.47As mesa structured heterojunction p-n photodiodes with a novel passivation methodology based on a fully depleted thin p-InP layer. Mesa-structured detectors are targeted due to their competitive advantages for applications such as multicolor/hyperspectral imaging. Test detector pixels with different perimeter/area ratios are fabricated with and without etching thin InP passivation layer between pixels in order to comparatively examine passivating behavior. I-V characteristics of the test detectors are measured at room temperature. Based on the results from different sized pixel groups, bulk and surface dark current components are separated. Results show that thin InP layer decreases dark current by a factor of 3 while increasing photo current due to a higher carrier collection efficiency.
Subject Keywords
SWIR
,
P-n diodes
,
InP passivation
,
In-device passivation
,
InGaAs
,
Heterojunction
,
Fully depleted passivation
URI
https://hdl.handle.net/11511/30465
DOI
https://doi.org/10.1117/12.2262499
Conference Name
Conference on Image Sensing Technologies - Materials, Devices, Systems, and Applications IV
Collections
Graduate School of Natural and Applied Sciences, Conference / Seminar
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M. H. Dolas, K. Çırçır, and S. Kocaman, “Optimization of Mesa Structured InGaAs Based Photodiode Arrays,” Anaheim, CA, 2017, vol. 10209, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/30465.