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A micro power generator with planar coils on parylene cantilevers

In this paper an electromagnetic vibration based micro power generator is presented. The proposed generator is composed of parylene cantilevers on which planar coils are fabricated. The system uses external vibrations to generate power by virtue of the relative motion between the cantilevers and a magnet. The parameters of the micro generator have been optimized for maximum output and it has been fabricated in micro scale. Initials tests show that 8.75 mV could be obtained from the proposed generator at a vibration frequency of 5.1 kHz.