Analysis and characterization of an electrostatically actuated in-plane parylene microvalve

This paper presents analysis and implementation of a simple electrostatic microvalve designed for use in parylene-based lab-on-a-chip devices. The microvalve utilizes an in-plane collapsing diaphragm. To investigate the pull-in behavior of the diaphragm and flow characteristics, a thorough analysis is carried out using the finite element method. Microvalves with different diaphragm radii are fabricated using surface micromachining techniques. Pull-in tests are carried out under the no-flow condition with air, oil and water as the working fluid. Test results show that the pull-in occurs around 20 V for 450 mu m radius diaphragms with oil and air. However, it is not possible to observe pull-in up to 100 V (both ac and dc) for the case of water as the working fluid, due to its relatively high dielectric constant and conductivity. The flow tests show that no leakage flow was observed up to 4 kPa inlet pressure under 85 V actuation potential. The leakage ratio becomes 17% at 10 kPa inlet pressure. It is observed that the leakage can be reduced controllably by increasing the actuation potential, enabling the precise control of the flow rate.


An electromagnetic micro energy harvester based on an array of parylene cantilevers
Sari, Ibrahim; Balkan, Raif Tuna; Külah, Haluk (IOP Publishing, 2009-10-01)
This paper presents the design, optimization and implementation of an electromagnetic type vibration-to-electrical micro energy harvester. The proposed harvester implements a new design employing array of parylene cantilevers on which planar gold coils are fabricated. The micro harvester generates voltage by virtue of the relative motion between the coils and a stationary magnet. The coils are connected electrically in series to sum up the voltage output from individual cantilevers. The number of cantilever...
Design and fabrication of a high performance resonant MEMS temperature sensor
Kose, Talha; Azgın, Kıvanç; Akın, Tayfun (IOP Publishing, 2016-04-01)
This paper presents a high performance MEMS temperature sensor comprised of a double-ended-tuning-fork (DETF) resonator and strain-amplifying beam structure. The temperature detection is based on the 'thermal strain induced frequency variations' of the DETF resonator. The major source of thermal strain leading to the frequency shifts is the difference in thermal expansion coefficients of the substrate and the device layers of the fabricated structures. By selecting the substrate as glass and the device laye...
MEMS resonant load cells for micro-mechanical test frames: feasibility study and optimal design
Torrents, A.; Azgın, Kıvanç; Godfrey, S. W.; Topalli, E. S.; Akın, Tayfun; Valdevit, L. (IOP Publishing, 2010-12-01)
This paper presents the design, optimization and manufacturing of a novel micro-fabricated load cell based on a double-ended tuning fork. The device geometry and operating voltages are optimized for maximum force resolution and range, subject to a number of manufacturing and electromechanical constraints. All optimizations are enabled by analytical modeling (verified by selected finite elements analyses) coupled with an efficient C++ code based on the particle swarm optimization algorithm. This assessment i...
A method for wafer level hermetic packaging of SOI-MEMS devices with embedded vertical feedthroughs using advanced MEMS process
Torunbalci, Mustafa Mert; Alper, Said Emre; Akın, Tayfun (IOP Publishing, 2015-12-01)
This paper presents a novel, inherently simple, and low-cost fabrication and hermetic packaging method developed for SOI-MEMS devices, where a single SOI wafer is used for the fabrication of MEMS structures as well as vertical feedthroughs, while a single glass cap wafer is used for hermetic encapsulation and routing metallization. Hermetic encapsulation can be achieved either with the silicon-glass anodic or Au-Si eutectic bonding techniques. The dies sealed with anodic and Au-Si eutectic bonding provide a...
The effects of tine coupling and geometrical imperfections on the response of DETF resonators
Azgın, Kıvanç (IOP Publishing, 2013-12-01)
This paper presents a two-degree-of-freedom analytical model for the electromechanical response of double ended tuning fork (DETF) force sensors. The model describes the mechanical interaction between the tines and allows investigation of the effect of a number of asymmetries, in tine stiffness, mass, electromechanical parameters and load sharing between the tines. These asymmetries are introduced during fabrication (e. g., as a result of undercut) and are impossible to completely eliminate in a practical d...
Citation Formats
E. Yıldırım and H. Külah, “Analysis and characterization of an electrostatically actuated in-plane parylene microvalve,” JOURNAL OF MICROMECHANICS AND MICROENGINEERING, pp. 0–0, 2011, Accessed: 00, 2020. [Online]. Available: