A folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer

Date

2017-05-01

Author

Demirel, Kaan
Yazgan, Erdem
Demir, Şimşek
Akın, Tayfun

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

149
views

0
downloads

Design and fabrication of a folded leg Ka-band RF micro electro mechanical systems (RF MEMS) is presented. The mechanical design is carried out to observe minimum permanent deformation on the MEMS bridge after our in-house MEMS packaging process temperature treatment (200 A degrees C). On the other hand, the actuation voltage is aimed as < 30 V and measured as 24-25 V before thermal treatment. Moreover, the switch shows 28-29 V actuation voltage after thermal treatment. The fabricated switch shows -0.4 dB insertion loss for the up state position at Ka-band, before and after heat treatment. The switch is fabricated on quartz wafer using an in-house surface micromachining process with a new amorphous silicon sacrificial layer structure.

Subject Keywords

Hardware and Architecture, Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Condensed Matter Physics

URI

https://hdl.handle.net/11511/38861

Journal

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

DOI

https://doi.org/10.1007/s00542-016-2892-5

Collections

Department of Electrical and Electronics Engineering, Article

Suggestions

OpenMETU
Core

Custom integrated circuit design for ultrasonic therapeutic CMUT array Maadi, Mohammad; Bayram, Barış (Springer Science and Business Media LLC, 2015-04-01) This paper presents the design of a highly flexible and programmable transmit beam-former ASIC using a high voltage (HV) 0.35 mu m CMOS technology to be flip-chip bonded to a 4 x 4 CMUT array for ultrasound therapeutic applications. However, proposed IC can be used as a transmitter circuitry in color Doppler 3D imaging applications. In our proposed chip, each CMUT element is provided by an 8-bit shift register, an 8-bit comparator, a one-shot circuit with adjustable pulse width, a programmable pulse train g...
An on-die ultra-low voltage DC-DC step-up converter with voltage doubling LC-tank Jayaweera, H. M. P. C.; Pathirana, W. P. M. R.; Muhtaroglu, Ali (IOP Publishing; 2016-12-01) In this paper we report the design, characterization and verification of a novel on-die ultra-low voltage DC-DC converter circuit for energy harvester applications in 0.18 mu m complementary metal oxide semiconductor (CMOS) technology. The circuit self-starts, does not use off-chip components, and is thus suitable for use in highly integrated low cost systems. The first version of the design has a five-stage charge-pump stimulated by an oscillator with two center-tap inductors. It is validated on a test chi...
A 15-40-GHz Frequency Reconfigurable RF MEMS Phase Shifter Ünlü, Mehmet; Demir, Şimşek; Akın, Tayfun (Institute of Electrical and Electronics Engineers (IEEE), 2013-08-01) This paper presents a novel frequency reconfigurable phase shifter using the RF microelectromechanical systems (MEMS) technology. The phase shifter is based on the triple-stub circuit topology composed of three stubs that are connected by two transmission lines that are all implemented as distributed MEMS transmission lines. The insertion phase of the circuit is controlled by changing the electrical lengths of the stubs and the connecting transmission lines, while having ideally zero reflection coefficient ...
A wireless batch sealed absolute capacitive pressure sensor Akar, O.; Akın, Tayfun; Najafi, K. (Elsevier BV, 2001-12-15) This paper reports the development of an absolute wireless pressure sensor that consists of a capacitive sensor and a gold-electroplated planar coil. Applied pressure deflects a 6 mum-thin silicon diaphragm, changing the capacitance formed between it and a metal electrode supported on a glass substrate. The resonant frequency of the LC circuit formed by the capacitor and the inductor changes as the capacitance changes; this change is sensed remotely through inductive coupling, eliminating the need for wire ...
An electromagnetic micro energy harvester based on an array of parylene cantilevers Sari, Ibrahim; Balkan, Raif Tuna; Külah, Haluk (IOP Publishing, 2009-10-01) This paper presents the design, optimization and implementation of an electromagnetic type vibration-to-electrical micro energy harvester. The proposed harvester implements a new design employing array of parylene cantilevers on which planar gold coils are fabricated. The micro harvester generates voltage by virtue of the relative motion between the coils and a stationary magnet. The coils are connected electrically in series to sum up the voltage output from individual cantilevers. The number of cantilever...

Citation Formats

K. Demirel, E. Yazgan, Ş. Demir, and T. Akın, “A folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer,” MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, pp. 1191–1200, 2017, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/38861.