A 15-40-GHz Frequency Reconfigurable RF MEMS Phase Shifter

Date

2013-08-01

Author

Ünlü, Mehmet
Demir, Şimşek
Akın, Tayfun

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

98
views

0
downloads

This paper presents a novel frequency reconfigurable phase shifter using the RF microelectromechanical systems (MEMS) technology. The phase shifter is based on the triple-stub circuit topology composed of three stubs that are connected by two transmission lines that are all implemented as distributed MEMS transmission lines. The insertion phase of the circuit is controlled by changing the electrical lengths of the stubs and the connecting transmission lines, while having ideally zero reflection coefficient at all times. The phase shifter has theoretically no specific limits on the frequency; in other words, it can be reconfigured to work at any frequency between 15-40 GHz, with adjustable phase steps, while providing a constant time delay within a 2%-3% instantaneous bandwidth around any selected center frequency in the above-mentioned band. The phase shifter is fabricated monolithically using a surface micromachining process on a quartz substrate and occupies 10.8 mm x 5.9 mm. Measurement results show that the phase shifter has average phase error of 1.6 degrees, 3.7 degrees, and 4.7 degrees, average insertion loss of 3.1, 5, and 8.2 dB and average return loss of 19.3, 15.8, and 13.7 dB at 15, 30, and 40 GHz, respectively. To the best of our knowledge, this paper demonstrates the first phase shifter in the literature that can work at any given frequency in a targeted band with adjustable phase steps.

Subject Keywords

Electrical and Electronic Engineering, Radiation, Condensed Matter Physics

URI

https://hdl.handle.net/11511/47097

Journal

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES

DOI

https://doi.org/10.1109/tmtt.2013.2271995

Collections

Department of Electrical and Electronics Engineering, Article

Suggestions

OpenMETU
Core

A monolithic phased array using 3-bit distributed RF MEMS phase shifters Topalli, Kagan; Aydın Çivi, Hatice Özlem; Demir, Şimşek; Koç, Seyit Sencer; Akın, Tayfun (Institute of Electrical and Electronics Engineers (IEEE), 2008-02-01) This paper presents a novel electronically scanning phased-array antenna with 128 switches monolithically implemented using RF microelectromechanical systems (MEMS) technology. The structure, which is designed at 15 GHz, consists of four linearly placed microstrip patch antennas, 3-bit distributed RF MEMS low-loss phase shifters, and a corporate feed network. MEMS switches and high-Q metal-air-metal capacitors are employed as loading elements in the phase shifter. The system is fabricated monolithically usi...
An Automatically Mode-Matched MEMS Gyroscope With Wide and Tunable Bandwidth Sonmezoglu, Soner; Alper, Said Emre; Akın, Tayfun (Institute of Electrical and Electronics Engineers (IEEE), 2014-04-01) This paper presents the architecture and experimental verification of the automatic mode-matching system that uses the phase relationship between the residual quadrature and drive signals in a gyroscope to achieve and maintain matched resonance mode frequencies. The system also allows adjusting the system bandwidth with the aid of the proportional-integral controller parameters of the sense-mode force-feedback controller, independently from the mechanical sensor bandwidth. This paper experimentally examines...
An Adaptable Interface Circuit With Multistage Energy Extraction for Low-Power Piezoelectric Energy Harvesting MEMS Chamanian, Salar; Ulusan, Hasan; Koyuncuoglu, Aziz; Muhtaroglu, Ali; Külah, Haluk (Institute of Electrical and Electronics Engineers (IEEE), 2019-03-01) This paper presents a self-powered interface circuit to extract energy from ambient vibrations for powering up microelectronic devices. The circuit interfaces a piezoelectric energy harvesting micro electro-mechanical systems (MEMS) device to scavenge acoustic energy. Synchronous electric charge extraction (SECE) technique is deployed through the implementation of a novel multistage energy extraction (MSEE) circuit in 180 nm HV CMOS technology to harvest and store energy. The circuit is optimized to operate...
A Compact Angular Rate Sensor System Using a Fully Decoupled Silicon-on-Glass MEMS Gyroscope Alper, Said Emre; Temiz, Yuksel; Akın, Tayfun (Institute of Electrical and Electronics Engineers (IEEE), 2008-12-01) This paper presents the development of a compact single-axis angular rate sensor system employing a 100-mu m-thick single-crystal silicon microelectromechanical systems gyroscope with an improved decoupling arrangement between the drive and sense modes. The improved decoupling arrangement of the gyroscope enhances the robustness of sensing frame against drive-mode oscillations and therefore minimizes mechanical crosstalk between the drive and sense modes, yielding a small bias instability. The gyroscope cor...
Novel impedance tuner, phase shifter, and vector modulators using rf mems technology Ünlü, Mehmet; Demir, Şimşek; Department of Electrical and Electronics Engineering (2009) This thesis presents the theory, design, fabrication, and measurement results of novel reconfigurable impedance tuner, phase shifter, and vector modulators using the RF MEMS technology. The presented circuits are based on triple stub topology, and it is shown both theoretically and experimentally in this thesis that it is possible to control the insertion phase and amplitude of the input signal simultaneously using this topology. The presented circuits are implemented using an in-house, surface micromachini...

Citation Formats

M. Ünlü, Ş. Demir, and T. Akın, “A 15-40-GHz Frequency Reconfigurable RF MEMS Phase Shifter,” IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, pp. 2865–2877, 2013, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/47097.