An energy harvesting MEMS frequency detector

Sari, Ibrahim
Balkan, Tuna
Külah, Haluk
This paper presents an energy harvesting electromagnetic MEMS sensor that can detect the frequency of environmental vibrations. The device is composed of a number of serially connected coils that are fabricated on parylene cantilevers in different lengths, and can output the frequency content of ambient vibrations while harvesting electrical energy in a wide band of predetermined frequency range (3.7-4.7 kHz). The sensor generates an output voltage at the ambient vibration frequency by virtue of the relative motion of the cantilevers with respect to a magnet through electromagnetic induction. The induced voltage is processed by readout electronics to extract the frequency information. The sensor also scavenges energy that can be used to increase the life-time of the power supply of the readout electronics.
6th IEEE Sensors Conference


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Citation Formats
I. Sari, T. Balkan, and H. Külah, “An energy harvesting MEMS frequency detector,” presented at the 6th IEEE Sensors Conference, Atlanta, GA, 2007, Accessed: 00, 2020. [Online]. Available: