An energy harvesting MEMS frequency detector

Date

2007-10-31

Author

Sari, Ibrahim
Balkan, Tuna
Külah, Haluk

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This paper presents an energy harvesting electromagnetic MEMS sensor that can detect the frequency of environmental vibrations. The device is composed of a number of serially connected coils that are fabricated on parylene cantilevers in different lengths, and can output the frequency content of ambient vibrations while harvesting electrical energy in a wide band of predetermined frequency range (3.7-4.7 kHz). The sensor generates an output voltage at the ambient vibration frequency by virtue of the relative motion of the cantilevers with respect to a magnet through electromagnetic induction. The induced voltage is processed by readout electronics to extract the frequency information. The sensor also scavenges energy that can be used to increase the life-time of the power supply of the readout electronics.

Subject Keywords

Computer Science, Artificial Intelligence, Engineering, Electrical & Electronic, Remote Sensing, Optics

URI

https://hdl.handle.net/11511/39467

DOI

https://doi.org/10.1109/icsens.2007.4388689

Conference Name

6th IEEE Sensors Conference

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

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Citation Formats

I. Sari, T. Balkan, and H. Külah, “An energy harvesting MEMS frequency detector,” presented at the 6th IEEE Sensors Conference, Atlanta, GA, 2007, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/39467.