Show/Hide Menu
Hide/Show Apps
Logout
Türkçe
Türkçe
Search
Search
Login
Login
OpenMETU
OpenMETU
About
About
Open Science Policy
Open Science Policy
Open Access Guideline
Open Access Guideline
Postgraduate Thesis Guideline
Postgraduate Thesis Guideline
Communities & Collections
Communities & Collections
Help
Help
Frequently Asked Questions
Frequently Asked Questions
Guides
Guides
Thesis submission
Thesis submission
MS without thesis term project submission
MS without thesis term project submission
Publication submission with DOI
Publication submission with DOI
Publication submission
Publication submission
Supporting Information
Supporting Information
General Information
General Information
Copyright, Embargo and License
Copyright, Embargo and License
Contact us
Contact us
Analysis and Elimination of the Capacitive Feedthrough Current on Electrostatically Actuated and Sensed Resonance-Based MEMS Sensors
Date
2017-12-01
Author
Kangul, Mustafa
Aydin, Eren
Gokce, Furkan
Zorlu, Ozge
Külah, Haluk
Metadata
Show full item record
This work is licensed under a
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
.
Item Usage Stats
211
views
0
downloads
Cite This
This paper presents the investigation of two different capacitive feedthrough current elimination methods with an analysis of the effect of the capacitive feedthrough current on the resonance characteristics of electrostatically actuated and sensed resonant MEMS sensors. Electrostatically actuated and sensed resonators have various applications, such as accelerometers, gyroscopes, mass sensors, and temperature sensors. In most of these applications, as sensitivity increases, gain decreases. The capacitive feedthrough current between the drive and sense electrodes disturbs the resonance characteristics of the resonator, especially when the gain is rather small. In order to eliminate the dominating feedthrough current in such cases, two methods were proposed. In the first method, differential input signals were applied to two separate resonators, one active and one passive, sharing the same sense electrode. Although this method seems to be easily applicable to all types of resonators, this study has shown that mismatches between the resonator pair prevent perfect elimination of the feedthrough current. In the second method, a novel lateral electrostatic resonator with differential sense electrodes was designed and fabricated to eliminate the feedthrough current. Measurements showed that the feedthrough effect was successfully eliminated and 27 times higher SNRdB was achieved with this method. Moreover, it was successfully demonstrated that any mismatch can be compensated by a simple resistive adjustment. [2016-0288]
Subject Keywords
Resonator
,
MEMS
,
Feedthrough current
,
Differential reading
URI
https://hdl.handle.net/11511/41346
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
DOI
https://doi.org/10.1109/jmems.2017.2729624
Collections
Department of Electrical and Electronics Engineering, Article
Suggestions
OpenMETU
Core
Performance analysis and comparison of reduced common mode voltage PWM and standard PWM techniques for three-phase voltage source inverters
Un, E; Hava, Ahmet Masum (2006-03-23)
This paper investigates the performance characteristics of the reduced common mode voltage (RCMV) PWM methods for three phase voltage source inverters and provides a comparison with the standard PWM methods. PWM methods are reviewed and their pulse patterns and common mode voltage patterns illustrated. The AC output current ripple, DC link input current ripple, and output voltage linearity characteristics of each modulation method are thoroughly investigated by analytical methods and simulations. The analys...
A Novel Characterization Method for MEMS Based Electrostatic Resonators for Q Enhancement and Feedthrough Current Elimination
AYDIN GÖL, EBRU; Kangul, M.; Gökce, Fuat; Zorlu, O.; Külah, Haluk (2016-11-03)
This paper introduces a new technique for electrostatic resonance characterization based on 2nd harmonic distortion terms at the output current. Mathematical analysis of the output current shows that the 2nd harmonic component exhibits higher quality factor (Q) than the 1st harmonic. Besides, output current to feedthrough current ratio is higher in the 2nd harmonic term. Experimental results show that the Q of the resonating system is enhanced by 66% with 2nd harmonic operation. Moreover, the resonance peak...
Design, fabrication, and characterization of micro thermal actuators
Gülcüler, Buğrahan; Azgın, Kıvanç; Department of Mechanical Engineering (2020-11)
This thesis presents the design, fabrication, and characterization of V-Type thermal actuators, which will be used in an actuator system that is planned to be a tensile and compressive test setup to characterize the expandible cells by the help of double- ended tuning fork resonators as a force sensing mechanism. Actuators are serially packed to increase the generated force by them while maintaining the same deflection values. They have been connected to the overall system by springs to create a force on te...
Analysis of Field-Effect Passivation in Textured and Undiffused Silicon Surfaces
Turkay, Deniz; Koroglu, Cagil; Yerci, Selçuk (2019-09-13)
In this work, we present a numerical analysis comparing the field-effect passivation provided by fixed dielectric charges on planar and textured undiffused silicon surfaces. We focus particularly on the ratio of effective surface recombination velocities (S-eff) of planar and textured surfaces (sigma=S-eff,S-textured/S-eff,S-planar) utilizing the same fixed dielectric charge density (Q(f)) under the same injection conditions. To ensure a difference between the space-charge region profiles of textured and pl...
Modeling and Control of Multilevel Three - Phase PWM Current Source Inverter
Guedouani, R.; Fiala, B.; Berkouk, E. M.; Boucherit, M. S. (2011-09-10)
The new three-phase 5-level current-source inverter (CSI) proposed in this paper was developed by connecting two classical current source inverters (CSIs) in cascade. This structure lend an output current harmonics minimization and without the use of high-frequency modulation. The output current waveform of the five-level CSI is composed of intermediary current levels, which are typically obtained from inductors current sources. The operational principle of this structure was analyzed. And to reduce the out...
Citation Formats
IEEE
ACM
APA
CHICAGO
MLA
BibTeX
M. Kangul, E. Aydin, F. Gokce, O. Zorlu, and H. Külah, “Analysis and Elimination of the Capacitive Feedthrough Current on Electrostatically Actuated and Sensed Resonance-Based MEMS Sensors,”
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
, pp. 1272–1278, 2017, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/41346.