Show/Hide Menu
Hide/Show Apps
anonymousUser
Logout
Türkçe
Türkçe
Search
Search
Login
Login
OpenMETU
OpenMETU
About
About
Açık Bilim Politikası
Açık Bilim Politikası
Frequently Asked Questions
Frequently Asked Questions
Browse
Browse
By Issue Date
By Issue Date
Authors
Authors
Titles
Titles
Subjects
Subjects
Communities & Collections
Communities & Collections
A Novel Characterization Method for MEMS Based Electrostatic Resonators for Q Enhancement and Feedthrough Current Elimination
Date
2016-11-03
Author
AYDIN GÖL, EBRU
Kangul, M.
Gökce, Fuat
Zorlu, O.
Külah, Haluk
Metadata
Show full item record
This work is licensed under a
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
.
Item Usage Stats
2
views
0
downloads
This paper introduces a new technique for electrostatic resonance characterization based on 2nd harmonic distortion terms at the output current. Mathematical analysis of the output current shows that the 2nd harmonic component exhibits higher quality factor (Q) than the 1st harmonic. Besides, output current to feedthrough current ratio is higher in the 2nd harmonic term. Experimental results show that the Q of the resonating system is enhanced by 66% with 2nd harmonic operation. Moreover, the resonance peak has been improved from 0.2 dB to 5dB, showing the effective increase in output current to the feedthrough ratio.
Subject Keywords
Feedthrough current cancellation
,
Quality factor enhancement
,
Nonlinearity
,
Distortion
,
2nd harmonic
,
MEMS
,
Resonator
URI
https://hdl.handle.net/11511/54439
Collections
Department of Architecture, Conference / Seminar