Characterization and performance estimation of a MEMS spirometer

2016-09-07
Habibiabad, Sahar
Serinağaoğlu Doğrusöz, Yeşim
Beyaz, Mustafa Ilker
The electrical characteristics and performance estimation of a MEMS spirometer is reported. The device design incorporates a silicon turbine, integrated magnets, ball bearings, and stators having planar coils. Pneumatic actuation of the turbine with tangential gas flow induces voltages on the stators. Spirometer parameters including breathing flow rate and lung capacity can be determined from the induced voltage amplitude and frequency. Two 12-pole stators with 25- and 50-turns per pole were fabricated. The resistance and inductance values were measured to be 3.9 k Omega and 2.6 mH, and 15.8 k Omega and 10.3 mH, respectively. The expected sensitivity of the devices was calculated to be 0.1 V/lpm and 0.2 V/lpm for the 25- and 50-turns per pole stators, respectively. The integration of all device components will lead to a compact and low-cost spirometer for patient self-monitoring. (C) 2016 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license.

Suggestions

The Development and Performance Characterization of Turbine Prototypes for a MEMS Spirometer
GOREKE, Utku; HABİBİABAD, Sahar; Azgın, Kıvanç; Serinağaoğlu Doğrusöz, Yeşim; Beyaz, Mustafa Ilker (2016-02-01)
The design, optimization, and performance characterization of turbine prototypes for the development of a Microelectromechanical Systems spirometer is reported. Four different turbines were designed based on large-scale Savonius turbine architecture. The number of turbine blades was optimized through finite-element simulations to maximize the induced moment and rotational speed at normal breathing flow rates. The turbines were manufactured and tested for their speed performance with respect to input flow ra...
Analysis and Characterization of DC Bus Ripple Current of Two-Level Inverters Using The Equivalent Centered Harmonic Approach
Ayhan, Ufuk; Hava, Ahmet Masum (2011-09-22)
The dc bus PWM ripple current of three-phase two-level voltage source inverters is a function of the PWM method, the load current magnitude, power factor angle, and the modulation index. Thus, the ripple current characteristics are highly involved and difficult to understand. Using the double Fourier integral approach, this paper investigates the ripple current characteristics thoroughly for a wide range of operating conditions and PWM methods. Then, the equivalent harmonic approach is used to lump the ripp...
A Turbine-Based MEMS Sensor for Spirometry With Wearable Devices
Beyaz, Mustafa; Habibiabad, S.; Yildiz, H.; Goreke, U.; Azgın, Kıvanç (2019-10-01)
This paper presents a turbine-based microelectromechanical systems (MEMS) sensor for spirometry application. The compact sensor dimensions allow integration into smart wearable devices for mobile spirometry without a dedicated hand-held component. The sensor is composed of a turbine with embedded magnets, which is surrounded by two stators with micro coils in a PMMA package. Tangential gas flow actuates the turbine on ball bearings and results in voltage generation due to electromagnetic induction. The sens...
Temperature compensation of a capacitive mems accelerometer by using a mems oscillator
Kose, Talha; Azgın, Kıvanç; Akın, Tayfun (2016-02-25)
This study reports a temperature compensation method for a capacitive MEMS accelerometer by using a MEMS double-ended-tuning-fork (DETF) resonator integrated with the accelerometer structure on the same die. The proposed method utilizes the frequency information of the clamped-clamped DETF resonator which is oscillating in a closed-loop operation. In order to compensate the temperature dependence of the accelerometer output, frequency drift of the DETF resonator against changing temperature is used, i. e., ...
Implementation of 1 kV on LV feeders: a smart alternative to MV line investments to solve voltage drop problems at LV systems
OZENA, Kadir; CEBECI, Mahmut E.; TOR, Osman B.; BATAR, Gokhan; KILIC, Andac; TURKMEN, Ulfet; Güven, Ali Nezih (2017-04-21)
This paper presents methodology and on-site pilot implementation of utilizing 1 kV at low voltage (LV) feeders as an alternative to medium voltage (MV) line investments to solve voltage drop problems at LV systems. Typically distribution companies solve voltage drop problems of LV system by installing a new MV/LV transformer and transferring outmost loads of the existing transformer to the new transformer. This necessitates installation of MV line between the existing and new transformer. The implementation...
Citation Formats
S. Habibiabad, Y. Serinağaoğlu Doğrusöz, and M. I. Beyaz, “Characterization and performance estimation of a MEMS spirometer,” 2016, vol. 168, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/42480.