Show/Hide Menu
Hide/Show Apps
Logout
Türkçe
Türkçe
Search
Search
Login
Login
OpenMETU
OpenMETU
About
About
Open Science Policy
Open Science Policy
Open Access Guideline
Open Access Guideline
Postgraduate Thesis Guideline
Postgraduate Thesis Guideline
Communities & Collections
Communities & Collections
Help
Help
Frequently Asked Questions
Frequently Asked Questions
Guides
Guides
Thesis submission
Thesis submission
MS without thesis term project submission
MS without thesis term project submission
Publication submission with DOI
Publication submission with DOI
Publication submission
Publication submission
Supporting Information
Supporting Information
General Information
General Information
Copyright, Embargo and License
Copyright, Embargo and License
Contact us
Contact us
Design and characterization of a MEMS membrane for a fiber optic microphone
Download
index.pdf
Date
2019
Author
Özmen, Göktuğ Cihan
Metadata
Show full item record
This work is licensed under a
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
.
Item Usage Stats
242
views
196
downloads
Cite This
The most critical part of a fiber optic MEMS microphone is the sensing element. The sensing element, membrane, is designed such that the microphone operates in the desired range with desired sensitivity. In this thesis, a MEMS membrane is designed and characterized which is aimed to be used in a fiber optic microphone with responsivity to the audible frequency range. This membrane is electrically deflectable and it has symmetrically located air holes. The design is microfabricated through the commercially available multi-user multi-project service (POLYMUMPS, MEMSCAP Inc., France). The optical and electrical characterizations of the membrane are performed by impedance analyzer and laser vibrometer, respectively. Since the design is to be used in an optical interferometry based microphones, the surface of the membrane is coated by gold. The transient and steady state analysis of the membrane is utilized and both the overall and the spatial response of the membrane is obtained. The fundamental resonance of the membrane is 28 kHz. From laser vibrometer measurements under 100 mV peak-to-peak voltage and 1V DC bias conditions, the peak displacement is found to be 10 nm. The applied voltage is converted to the pressure and the sensitivity of the membrane is calculated to be 40 nm/Pa at 28 kHz. By spatial analysis of the design, symmetry is also verified. This thesis offers a new approach to the design of MEMS membrane for optical microphones.
Subject Keywords
Microphone.
,
Keywords: Fiber optic microphone
,
MEMS membrane
,
CMUT
,
POLYMUMPS.
URI
http://etd.lib.metu.edu.tr/upload/12623228/index.pdf
https://hdl.handle.net/11511/43449
Collections
Graduate School of Natural and Applied Sciences, Thesis
Suggestions
OpenMETU
Core
Design and development of fiber optic MEMS microphone measurement system
Karaca, Ekin Muharrem; Bayram, Barış; Department of Electrical and Electronics Engineering (2019)
In this thesis, fiber optic MEMS microphone measurement system is designed and demonstrated. The displacement of the sensing element of the fiber optic microphone, the membrane, together with the optical components are 3-D modeled and simulated by means of finite element methods. The parameters of the optical system under different measurement conditions are optimized according to the simulation results. Based on the simulation results, the measurement system setup is designed, constructed and functionalize...
Dynamical analysis of the fiber optic coils through multiscale numerical modeling and modal tests
Kahveci, Özkan; Yalçınkaya, Tuncay; Department of Aerospace Engineering (2022-4-28)
Fiber optic gyroscopes (FOGs) are common rotation measurement devices in aerospace applications. They have a wide range of diversity in length and winding radius of coils to meet the system requirements. Every dimensional parameter in the coil influences the dynamic response of the system, which eventually leads to measurement errors. In order to eliminate the errors and qualify the system, after the design and production stages, a deep and comprehensive testing procedure follows. In this study, the dynamic...
Design of Irregularly Shaped Patch Antennas by using the Multiport Network Model
Sener, Goker; Alatan, Lale; Kuzuoğlu, Mustafa (2008-07-11)
The multiport network model (MNM) is an analytical method that is used to analyze microstrip antennas. MNM is based on defining ports along the periphery of the patch and evaluating the impedance matrix corresponding to these ports by using the Greenpsilas function for the cavity under the patch. For regular rectangular, triangular and circular patches, analytical expressions for the Greenpsilas function are available. In the analysis of irregular patches, Greenpsilas functions cannot be calculated explicit...
Design and implementation of VHF-UHF antenna with non-foster matching circuit
Aşcı, Cihan; Aydın Çivi, Hatice Özlem; Department of Electrical and Electronics Engineering (2018)
Matching networks are widely used in the antenna transmitter and receiver applications and thus they are an essential part of the RF system. Conventional passive matching networks are very broadly used for matching an antenna for a narrow band of frequencies; however, achieving a broad bandwidth characteristics for electrically–small antennas (ESAs) is not possible with the use of passive matching circuits. ESAs possess a large input reactance and the electrical size of the antenna element is very small com...
A numerical algorithm to determine straightness error, surface roughness, and waviness measured using a fiber optic interferometer
Yıldırım, Murat; Okutucu-Ozyurt, Tuba; Dursunkaya, Zafer (2016-11-01)
Fiber optic interferometry has been used to detect small displacements in diverse applications. Counting the number of fringes in fiber-optic interferometry is challenging due to the external effects induced in dynamic systems. In this paper, a novel interference fringe counting technique is developed to convert the intensity of interference data into displacements in the range of micrometers to millimeters while simultaneously resolving external dynamic effects. This technique consists of filtering the rou...
Citation Formats
IEEE
ACM
APA
CHICAGO
MLA
BibTeX
G. C. Özmen, “Design and characterization of a MEMS membrane for a fiber optic microphone,” Thesis (M.S.) -- Graduate School of Natural and Applied Sciences. Electrical and Electronics Engineering., Middle East Technical University, 2019.