Design and development of fiber optic MEMS microphone measurement system

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2019

Author

Karaca, Ekin Muharrem

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In this thesis, fiber optic MEMS microphone measurement system is designed and demonstrated. The displacement of the sensing element of the fiber optic microphone, the membrane, together with the optical components are 3-D modeled and simulated by means of finite element methods. The parameters of the optical system under different measurement conditions are optimized according to the simulation results. Based on the simulation results, the measurement system setup is designed, constructed and functionalized. The optical components of the system are chosen such that the overall system is compatible to high quality detection of the displacement of the membrane. The simulation results and experimental data are demonstrated to validate the operation of the measurement system. The system is demonstrated with optical components and the membrane, and characteristics of the fiber optic microphone are obtained. The results and observations related to the overall system are presented.

Subject Keywords

Microelectromechanical systems., Keywords: MEMS, Fiber Optics, Interferometer.

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http://etd.lib.metu.edu.tr/upload/12623979/index.pdf
https://hdl.handle.net/11511/44004

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Graduate School of Natural and Applied Sciences, Thesis

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Citation Formats

E. M. Karaca, “Design and development of fiber optic MEMS microphone measurement system,” Thesis (M.S.) -- Graduate School of Natural and Applied Sciences. Electrical and Electronics Engineering., Middle East Technical University, 2019.