Micromachined III-V cantilevers for AFM-tracking scanning hall probe microscopy

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Date

2003-01-01

Author

BROOK, ALEX J
BENDİNG, SJ
PINTO, JONATHAN
Oral, Ahmet
RİTCHİE, DAVİD
BEERE, H
SPRİNGTHORPE, A
HENİNİ, M

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In this paper we report the development of a new III-V cantilever-based atomic force sensor with piezoresistive detection and an integrated Hall probe for scanning Hall probe microscopy. We give detailed descriptions of the fabrication process and characterization of the new integrated sensor. which will allow the investigation of magnetic samples with no sample preparation at both room and cryogenic temperatures. We also introduce a novel piezoresistive material based on the ternary alloy n(+)-Al0.4Ga0.6As which allows us to achieve a cantilever deflection sensitivity DeltaR/(RDeltaz) = 2 x 10(-6) Angstrom(-1) at room temperature.

Subject Keywords

Mechanical Engineering, Electrical and Electronic Engineering, Mechanics of Materials, Electronic, Optical and Magnetic Materials

URI

https://hdl.handle.net/11511/44365

Journal

JOURNAL OF MICROMECHANICS AND MICROENGINEERING

DOI

https://doi.org/10.1088/0960-1317/13/1/317

Collections

Department of Physics, Article

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Citation Formats

A. J. BROOK et al., “Micromachined III-V cantilevers for AFM-tracking scanning hall probe microscopy,” JOURNAL OF MICROMECHANICS AND MICROENGINEERING, pp. 124–128, 2003, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/44365.