Impact of rapid thermal annealing on impurities removal efficiency from silicon carbide for optoelectronic applications

2019-11-27
Barbouche, M.
Zaghouani, R. Benabderrahmane
Benammar, N. E.
Khirouni, K.
Turan, Raşit
Ezzaouia, H.
Impurities are of crucial interest in optoelectronic devices as they affect carrier lifetimes and electrical properties. In view of that, it is important to incorporate certain processing steps to reduce impurities effect on final devices. The aim of this work is to enhance silicon carbide SiC purity for silicon passivation. Low cost method of SiC purification is presented. This method combines three main steps consisting of formation of porous silicon carbide layers by acid vapor etching followed by a photo-thermal annealing at different temperatures. Finally, obtained SiC powder was subject to a chemical treatment to remove porous SiC layer. Effect of gettering temperature on purification efficiency was evaluated by inductively coupled plasma atomic emission spectrometry (ICP-AES). The gettering experiment was performed at 800-950 degrees C, and optimum results were obtained at 950 degrees C. SiC purity is improved from 3 N (99.977%) to 5 N (99.999%) with an impurity removal efficiency of 96.56%. Purified SiC was used as a target to synthesize SiC layers using pulsed laser deposition technique (PLD) for optoelectronic devices. The use of intrinsic amorphous silicon carbide (a-SiC) passivating layers was investigated especially by photoconductivity decay technique. Improved SiC target purity leads to a significant enhancement of a-SiC passivating properties attributed to the surface recombination velocity decrease. Electrical properties of a-SiC/c-Si(p) were also studied using I-V and C-V techniques.
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY

Suggestions

Self-excitation of induction motors compensated by permanently connected capacitors and recommendations for IEEE Std 141-1993
Ermiş, Muammer; Cadirci, I; Zenginobuz, G; Tezcan, H (Institute of Electrical and Electronics Engineers (IEEE), 2003-03-01)
Self-excitation of induction motors compensated by permanently connected capacitors is investigated in this paper. Theoretical analyses of self, excitation phenomenon are carried out by using some simplified equivalent circuits, and a hybrid mathematical model in ABC/dq axes, respectively, in steady state and transient state. An unusual operating condition about water pumping stations is reported, in which water within the pipeline may drive the motor in the reverse direction at speeds higher than synchrono...
Impact of defected ground structures on the bandwidth of quarter wave impedance transformers and branch line hybrids
Polater, Ahmet Mert; Nesimoglu, Tayfun (Wiley, 2016-05-01)
In this article, impedance transformers and branch line hybrids are selected to demonstrate the impact of defected ground structures on the operational bandwidth of microwave circuits. Three different branch line hybrids are studied with simulations and laboratory measurements, these are; a standard branch line hybrid, one using tapered lines and another one using both tapered lines and DGS. Based on these results, an optimum design in terms of location, size and number of DGS was proposed to achieve the wi...
Energy efficiency of machining operations: A review
Moradnazhad, Mariyeh; ÜNVER, HAKKI ÖZGÜR (SAGE Publications, 2017-09-01)
Manufacturing processes are among the most energy intensive on earth. As negative ecological and economic impacts increase, reducing energy consumption is becoming critically important. In this article, a comprehensive overview of energy-saving strategies and opportunities for increasing energy efficiency in manufacturing operations is presented, with a focus on metal cutting processes. The issues and approaches involved in energy efficiency of machine tools and machining operations are reported in the lite...
Predicted impact of collector and zeolite choice on the thermodynamic and economic performance of a solar-powered adsorption cooling system
Baker, Derek Keıth (Informa UK Limited, 2007-04-01)
Transient thermodynamic and capital cost models for an intermittent solar-powered adsorption cooling system are presented. The models are used to predict size and cost trends as the type of zeolite and collector, and maximum zeolite temperature (T-Z,T-Max), are varied. The best synthetic and natural zeolites considered have similar performance. The minimum cost system uses a flat plate collector for T-Z,T- Max < 160 degrees C and an evacuated tube collector for T-Z,T- Max > 160 degrees C. Collector costs do...
Impact of high-level distributed generation penetration on the transmission system transient stability
Kurt, Burçak; Ertaş, Arif; Department of Electrical and Electronics Engineering (2009)
This thesis investigates the impact of high-level penetration of distributed generation especially from the renewable energy sources on the transient stability of the transmission system. Distributed generation is a source of electric power connected to the distribution network or on the consumer side. It is expected that distributed generation grows significantly by the increasing environmental concerns and deregulation in the market. As soon as the increasing penetration level, distributed generation star...
Citation Formats
M. Barbouche, R. B. Zaghouani, N. E. Benammar, K. Khirouni, R. Turan, and H. Ezzaouia, “Impact of rapid thermal annealing on impurities removal efficiency from silicon carbide for optoelectronic applications,” INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, pp. 731–739, 2019, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/45866.