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RF Telemetry Powering and Control of Hermetically-Sealed Integrated Sensors and Actuators
Date
2002-08-06
Author
Akın, Tayfun
Zıaıe, B.
Najafi, Khalıl
Metadata
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This work is licensed under a
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
.
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An RF telemetry system for powering and control of microminiature integrated transducers packaged in a hermetically sealed custom-made glass capsule is described. A class-E power amplifier is utilized to energize and control a single-channel microstimulator for neuromuscular applications. The transmitter can deliver 1.5 W of power through a solenoid antenna using a 12-V rechargeable battery, while achieving efficiencies greater than 90%. The microstimulator antenna is a 1.5-mm-diameter, 4-5-mm-long ferrite-cored solenoid coil which can generate peak voltages of up to 50 V, and up to 50 mW of power. A custom-made glass capsule electrostatically bonded to the microstimulator's silicon carrier provides a hermetic package for the implant. Lead transfer into the sealed chamber is achieved using thin films of iridium insulated with low-pressure chemical vapor deposition (LPCVD) thin films. Helium leak tests on these structures show leak rates below 10/sup -9/ cm/sup 3//s.
Subject Keywords
Radio frequency
,
Telemetry
,
Hermetic seals
,
Packaging
,
Glass
,
Solenoids
,
Sputtering
,
Control systems
,
Transducers
,
Power amplifiers
URI
https://hdl.handle.net/11511/45920
DOI
https://doi.org/10.1109/solsen.1990.109840
Collections
Department of Electrical and Electronics Engineering, Conference / Seminar