RF Telemetry Powering and Control of Hermetically-Sealed Integrated Sensors and Actuators

Date

2002-08-06

Author

Akın, Tayfun
Najafi, Khalıl

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An RF telemetry system for powering and control of microminiature integrated transducers packaged in a hermetically sealed custom-made glass capsule is described. A class-E power amplifier is utilized to energize and control a single-channel microstimulator for neuromuscular applications. The transmitter can deliver 1.5 W of power through a solenoid antenna using a 12-V rechargeable battery, while achieving efficiencies greater than 90%. The microstimulator antenna is a 1.5-mm-diameter, 4-5-mm-long ferrite-cored solenoid coil which can generate peak voltages of up to 50 V, and up to 50 mW of power. A custom-made glass capsule electrostatically bonded to the microstimulator's silicon carrier provides a hermetic package for the implant. Lead transfer into the sealed chamber is achieved using thin films of iridium insulated with low-pressure chemical vapor deposition (LPCVD) thin films. Helium leak tests on these structures show leak rates below 10/sup -9/ cm/sup 3//s.

Subject Keywords

Radio frequency, Telemetry, Hermetic seals, Packaging, Glass, Solenoids, Sputtering, Control systems, Transducers, Power amplifiers

URI

https://hdl.handle.net/11511/45920

DOI

https://doi.org/10.1109/solsen.1990.109840

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

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Citation Formats

T. Akın and K. Najafi, “RF Telemetry Powering and Control of Hermetically-Sealed Integrated Sensors and Actuators,” 2002, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/45920.