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A second harmonic based resonance characterization method for MEMS electrostatic resonators
Date
2018-05-01
Author
Aydin, EREN
GOKCE, Furkan
Kangul, MUSTAFA
ZORLU, Ozge
Külah, Haluk
Metadata
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Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
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This paper presents a novel read-out approach both for eliminating parasitic feedthrough current and for enhancing the quality-factor (Q) of the resonating system at the same time. A new resonance characterization method based on sensing second harmonic component of the resonators was developed. Utilizing this method, the feedthrough current was eliminated and the signal-to-background ratio was increased from 0.9 dB to 35.5 dB. Furthermore, the Q of the resonating system was improved by 65% experimentally. It was shown that this method is suitable for eliminating both capacitive and resistive feedthrough current without using complex MEMS designs and interface electronics.
Subject Keywords
Instrumentation
,
Electrical and Electronic Engineering
,
Electronic, Optical and Magnetic Materials
,
Surfaces, Coatings and Films
,
Condensed Matter Physics
,
Metals and Alloys
URI
https://hdl.handle.net/11511/47092
Journal
SENSORS AND ACTUATORS A-PHYSICAL
DOI
https://doi.org/10.1016/j.sna.2018.03.013
Collections
Department of Electrical and Electronics Engineering, Article
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E. Aydin, F. GOKCE, M. Kangul, O. ZORLU, and H. Külah, “A second harmonic based resonance characterization method for MEMS electrostatic resonators,”
SENSORS AND ACTUATORS A-PHYSICAL
, pp. 220–230, 2018, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/47092.