A second harmonic based resonance characterization method for MEMS electrostatic resonators

Date

2018-05-01

Author

Aydin, EREN
GOKCE, Furkan
Kangul, MUSTAFA
ZORLU, Ozge
Külah, Haluk

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This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

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This paper presents a novel read-out approach both for eliminating parasitic feedthrough current and for enhancing the quality-factor (Q) of the resonating system at the same time. A new resonance characterization method based on sensing second harmonic component of the resonators was developed. Utilizing this method, the feedthrough current was eliminated and the signal-to-background ratio was increased from 0.9 dB to 35.5 dB. Furthermore, the Q of the resonating system was improved by 65% experimentally. It was shown that this method is suitable for eliminating both capacitive and resistive feedthrough current without using complex MEMS designs and interface electronics.

Subject Keywords

Instrumentation, Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Surfaces, Coatings and Films, Condensed Matter Physics, Metals and Alloys

URI

https://hdl.handle.net/11511/47092

Journal

SENSORS AND ACTUATORS A-PHYSICAL

DOI

https://doi.org/10.1016/j.sna.2018.03.013

Collections

Department of Electrical and Electronics Engineering, Article

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Citation Formats

E. Aydin, F. GOKCE, M. Kangul, O. ZORLU, and H. Külah, “A second harmonic based resonance characterization method for MEMS electrostatic resonators,” SENSORS AND ACTUATORS A-PHYSICAL, pp. 220–230, 2018, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/47092.