A monolithic phased array using 3-bit distributed RF MEMS phase shifters

This paper presents a novel electronically scanning phased-array antenna with 128 switches monolithically implemented using RF microelectromechanical systems (MEMS) technology. The structure, which is designed at 15 GHz, consists of four linearly placed microstrip patch antennas, 3-bit distributed RF MEMS low-loss phase shifters, and a corporate feed network. MEMS switches and high-Q metal-air-metal capacitors are employed as loading elements in the phase shifter. The system is fabricated monolithically using an in-house surface micromachining process on a glass substrate and occupies an area of 6 cm x 5 cm. The measurement results show that the phase shifter can provide nearly 20 degrees/50 degrees/95 degrees phase shifts and their combinations at the expense of 1.5-dB average insertion loss at 15 GHz for eight combinations. It is also shown by measurements that the main beam can be steered to required directions by suitable settings of the RF MEMS phase shifters.


A 15-40-GHz Frequency Reconfigurable RF MEMS Phase Shifter
Ünlü, Mehmet; Demir, Şimşek; Akın, Tayfun (Institute of Electrical and Electronics Engineers (IEEE), 2013-08-01)
This paper presents a novel frequency reconfigurable phase shifter using the RF microelectromechanical systems (MEMS) technology. The phase shifter is based on the triple-stub circuit topology composed of three stubs that are connected by two transmission lines that are all implemented as distributed MEMS transmission lines. The insertion phase of the circuit is controlled by changing the electrical lengths of the stubs and the connecting transmission lines, while having ideally zero reflection coefficient ...
An Adaptable Interface Circuit With Multistage Energy Extraction for Low-Power Piezoelectric Energy Harvesting MEMS
Chamanian, Salar; Ulusan, Hasan; Koyuncuoglu, Aziz; Muhtaroglu, Ali; Külah, Haluk (Institute of Electrical and Electronics Engineers (IEEE), 2019-03-01)
This paper presents a self-powered interface circuit to extract energy from ambient vibrations for powering up microelectronic devices. The circuit interfaces a piezoelectric energy harvesting micro electro-mechanical systems (MEMS) device to scavenge acoustic energy. Synchronous electric charge extraction (SECE) technique is deployed through the implementation of a novel multistage energy extraction (MSEE) circuit in 180 nm HV CMOS technology to harvest and store energy. The circuit is optimized to operate...
An Automatically Mode-Matched MEMS Gyroscope With Wide and Tunable Bandwidth
Sonmezoglu, Soner; Alper, Said Emre; Akın, Tayfun (Institute of Electrical and Electronics Engineers (IEEE), 2014-04-01)
This paper presents the architecture and experimental verification of the automatic mode-matching system that uses the phase relationship between the residual quadrature and drive signals in a gyroscope to achieve and maintain matched resonance mode frequencies. The system also allows adjusting the system bandwidth with the aid of the proportional-integral controller parameters of the sense-mode force-feedback controller, independently from the mechanical sensor bandwidth. This paper experimentally examines...
A Compact Angular Rate Sensor System Using a Fully Decoupled Silicon-on-Glass MEMS Gyroscope
Alper, Said Emre; Temiz, Yuksel; Akın, Tayfun (Institute of Electrical and Electronics Engineers (IEEE), 2008-12-01)
This paper presents the development of a compact single-axis angular rate sensor system employing a 100-mu m-thick single-crystal silicon microelectromechanical systems gyroscope with an improved decoupling arrangement between the drive and sense modes. The improved decoupling arrangement of the gyroscope enhances the robustness of sensing frame against drive-mode oscillations and therefore minimizes mechanical crosstalk between the drive and sense modes, yielding a small bias instability. The gyroscope cor...
A folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer
Demirel, Kaan; Yazgan, Erdem; Demir, Şimşek; Akın, Tayfun (Springer Science and Business Media LLC, 2017-05-01)
Design and fabrication of a folded leg Ka-band RF micro electro mechanical systems (RF MEMS) is presented. The mechanical design is carried out to observe minimum permanent deformation on the MEMS bridge after our in-house MEMS packaging process temperature treatment (200 A degrees C). On the other hand, the actuation voltage is aimed as < 30 V and measured as 24-25 V before thermal treatment. Moreover, the switch shows 28-29 V actuation voltage after thermal treatment. The fabricated switch shows -0.4 dB i...
Citation Formats
K. Topalli, H. Ö. Aydın Çivi, Ş. Demir, S. S. Koç, and T. Akın, “A monolithic phased array using 3-bit distributed RF MEMS phase shifters,” IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, pp. 270–277, 2008, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/35559.