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A miniature and non-resonant vibration-based energy harvester structure

This paper presents a miniature and non-resonant vibration based electromagnetic (EM) energy harvester, which generates energy from low frequency and low amplitude vibrations. The structure combines a MEMS-based coil realized on a parylene cantilever, and a miniature NdFeB magnet, resulting in a small sized EM harvester prototype with a strong magnetic part. The magnet is attached to a moving platform, whereas the coil is fixed to a stationary base. The mechanical frequency up-conversion (mFupC) technique is utilized to increase the energy conversion efficiency. The fabricated prototype has a volume of 120 mm(3) and generates 1.44 mV RMS voltage and 24 nW RMS power from 10 Hz, 4 mm peak-to-peak (0.8 g) external vibrations. A power density of 200 nW/cm(3) has been realized with the prototype.