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Collapsed regime operation of capacitive micromachined ultrasonic transducers based on wafer-bonding technique
Date
2003-01-01
Author
Huang, Y
Haeggstrom, E
Bayram, Barış
Zhuang, X
Ergun, AS
Cheng, CH
Khuri-Yakub, BT
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We report experimental results from collapsed regime operation of capacitive micromachined ultrasonic transducers (cMUTs) fabricated by a wafer bonding technique. The results show that a cMUT operating in the collapsed regime produces a maximal output pressure higher than a cMUT operating in the pre-collapse regime at 90 % of its collapse voltage, 1.79 kPa/V vs. 9.72 kPa/V at 2.3 MHz. In collapsed regime operation the fractional bandwidth (pulse echo) is increased compared to that obtained in pre-collapsed regime operation 140 % vs. 83 % with a bias 90 % of the collapse voltage. Characterization of 1-D cMUT arrays operating in oil was done by ultrasonic pulse echo and pitch catch measurements.
URI
https://hdl.handle.net/11511/53357
Conference Name
IEEE International Ultrasonics Symposium
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Department of Electrical and Electronics Engineering, Conference / Seminar
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Comparison of conventional and collapsed region operation of capacitive micromachined ultrasonic transducers
Huang, Yongli; Haeggstrom, Edward; Bayram, Barış; Zhuang, Xuefeng; Ergun, Arif Sanh; Cheng, Ching-Hsiang; Khuri-Yakub, Butrus T. (2006-10-01)
We report experimental results from a comparative study on collapsed region and conventional region operation of capacitive micromachined ultrasonic transducers (CMUTs) fabricated with a wafer bonding technique. Using ultrasonic pulse-echo and pitch-catch measurements, we characterized single elements of 1-D CMUT arrays operating in oil. The experimental results from this study agreed with the simulation results: a CMUT operating in the collapsed region produced a higher maximum output pressure than a CMUT ...
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Y. Huang et al., “Collapsed regime operation of capacitive micromachined ultrasonic transducers based on wafer-bonding technique,” presented at the IEEE International Ultrasonics Symposium, Honolulu, HI, 2003, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/53357.