Collapsed regime operation of capacitive micromachined ultrasonic transducers based on wafer-bonding technique

Huang, Y
Haeggstrom, E
Bayram, Barış
Zhuang, X
Ergun, AS
Cheng, CH
Khuri-Yakub, BT
We report experimental results from collapsed regime operation of capacitive micromachined ultrasonic transducers (cMUTs) fabricated by a wafer bonding technique. The results show that a cMUT operating in the collapsed regime produces a maximal output pressure higher than a cMUT operating in the pre-collapse regime at 90 % of its collapse voltage, 1.79 kPa/V vs. 9.72 kPa/V at 2.3 MHz. In collapsed regime operation the fractional bandwidth (pulse echo) is increased compared to that obtained in pre-collapsed regime operation 140 % vs. 83 % with a bias 90 % of the collapse voltage. Characterization of 1-D cMUT arrays operating in oil was done by ultrasonic pulse echo and pitch catch measurements.
IEEE International Ultrasonics Symposium


Comparison of conventional and collapsed region operation of capacitive micromachined ultrasonic transducers
Huang, Yongli; Haeggstrom, Edward; Bayram, Barış; Zhuang, Xuefeng; Ergun, Arif Sanh; Cheng, Ching-Hsiang; Khuri-Yakub, Butrus T. (2006-10-01)
We report experimental results from a comparative study on collapsed region and conventional region operation of capacitive micromachined ultrasonic transducers (CMUTs) fabricated with a wafer bonding technique. Using ultrasonic pulse-echo and pitch-catch measurements, we characterized single elements of 1-D CMUT arrays operating in oil. The experimental results from this study agreed with the simulation results: a CMUT operating in the collapsed region produced a higher maximum output pressure than a CMUT ...
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Citation Formats
Y. Huang et al., “Collapsed regime operation of capacitive micromachined ultrasonic transducers based on wafer-bonding technique,” presented at the IEEE International Ultrasonics Symposium, Honolulu, HI, 2003, Accessed: 00, 2020. [Online]. Available: