DESIGN AND IMPLEMENTATION OF HIGH FILL-FACTOR STRUCTURES FOR LOW-COST CMOS MICROBOLOMETERS

Date

2018-01-25

Author

Erturk, Ozan
Akın, Tayfun

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This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

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This paper reports utilization of high-fill factor absorber structures integrated onto SOI diode type low-cost uncooled microbolometers for broadband absorption performance. Mechanical and optical simulations are performed to assess the enhancement and mechanical stability of the absorber structures. Reported first time in the literature, four types of different absorber structures are employed on the same detector focal plane array (FPA) in order to evaluate the improvement provided by different absorber structures comparatively on the same sensor. This study is conducted on 50 mu m pitched pixels with the FPA format of 160 x 120.

URI

https://hdl.handle.net/11511/54203

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Department of Electrical and Electronics Engineering, Conference / Seminar

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Citation Formats

O. Erturk and T. Akın, “DESIGN AND IMPLEMENTATION OF HIGH FILL-FACTOR STRUCTURES FOR LOW-COST CMOS MICROBOLOMETERS,” 2018, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/54203.