High-frequency CMUT arrays for high-resolution medical imaging

Date

2004-01-01

Author

Oralkan, O
Hansen, ST
Bayram, Barış
Yaralioglu, GG
Ergun, AS
Khuri-Yakob, BT

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

30
views

0
downloads

This paper describes high-frequency I-D CMUT arrays designed and fabricated for use in electronically scanned high-resolution ultrasonic imaging systems. Two different designs of 64-element linear CMUT arrays are presented in this paper. A single element in each array is connected to a single-channel custom front-end integrated circuit for pulse-echo operation. The first design has a resonant frequency of 43 MHz in air, and operates at 30 MHz in immersion. The second design exhibits a resonant frequency of 60 MHz in air, and operates at 45 MHz in immersion. The experimental results are compared to simulation results obtained from the equivalent circuit model and nonlinear dynamic finite element analysis; a good agreement is observed between these results. This paper also briefly discusses the effects of the area rill factor on the frequency characteristics of CMUTs, which reveals that the transducer active area should be maximized to obtain a wideband response at high frequencies.

Subject Keywords

Acoustics, Physics

URI

https://hdl.handle.net/11511/54211

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

Suggestions

OpenMETU
Core

High performance HgCdTe photodetector desings via dark current suppression Özer, Yiğit; Kocaman, Serdar; Department of Electrical and Electronics Engineering (2018) This thesis work covers the numerical analysis and design of infrared photon detectors with a focus of HgCdTe based devices. An in-house numerical tool is utilized for the design and characterization process, where the Poisson, current and continuity equations are solved numerically with the high precision in electrical and optical properties. A high operating temperature alternative substrate mid-wave HgCdTe detector is designed benefiting from the generation-recombination dark current suppression. The adv...
Ultra-fast charge exchange spectroscopy for turbulent ion temperature fluctuation measurements on the DIII-D tokamak (invited) Uzun Kaymak, İlker Ümit; McKee, G. R. (2012-10-01) A novel two-channel, high throughput, high efficiency spectrometer system has been developed to measure impurity ion temperature and toroidal velocity fluctuations associated with long-wavelength turbulence and other plasma instabilities. The spectrometer observes the emission of the n = 8-7 hydrogenic transition of C+5 ions (lambda(air) = 529.06 nm) resulting from charge exchange reactions between deuterium heating beams and intrinsic carbon. Novel features include a large, prism-coupled high-dispersion, v...
Deep-trench RIE optimization for high performance MEMS microsensors Aydemir, Akın; Turan, Raşit; Department of Physics (2007) This thesis presents the optimization of deep reactive ion etching process (DRIE) to achieve high precision 3-dimensional integrated micro electro mechanical systems (MEMS) sensors with high aspect ratio structures. Two optimization processes have been performed to achieve 20 μm depth for 1 μm opening for a dissolved wafer process (DWP) and to achieve 100 μm depth for 1 μm opening for silicon-on-glass (SOG) process. A number of parameters affecting the etch rate and profile angle are investigated, including...
External Search Coil as a Means of Measuring Rotor Speed of an Induction Motor Özlü Ertan, Hatice Gülçin; Keysan, Ozan (2009-07-03) The study in this paper investigates whether the air gap harmonics can be identified by using an external search coil placed on the frame of an induction motor. For this purpose the study focuses on the prediction of rotor speed of an induction motor from external search coil emf, using spectral analysis techniques. In the first stage of the study the type of search coil which maximizes the induced emf is sought, also the position of the coil on the induced emf is investigated. Several motors are tested wit...
Low-cost uncooled infrared detector arrays in standard CMOS Eminoglu, S; Tanrikulu, MY; Akın, Tayfun (2003-04-25) This paper reports the development of a low-cost 128 x 128 uncooled infrared focal plane array (FPA) based on suspended and thermally isolated CMOS p(+)-active/n-well diodes. The FPA is fabricated using a standard 0.35 mum CMOS process followed by simple post-CMOS bulk micromachining that does not require any critical lithography or complicated deposition steps; and therefore, the cost of the uncooled FPA is almost equal to the cost of the CMOS chip. The post-CMOS fabrication steps include an RIE etching to...

Citation Formats

O. Oralkan, S. Hansen, B. Bayram, G. Yaralioglu, A. Ergun, and B. Khuri-Yakob, “High-frequency CMUT arrays for high-resolution medical imaging,” 2004, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/54211.