An array of square plate resonators with adjustable resonance frequency

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2022-8-19

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Polat, Halim

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In this study, a MEMS square plate resonator with adjustable resonance frequency is designed, mathematically modelled and verified with finite element analysis (FEA) and experiments. Resonance frequency of microelectromechanical system (MEMS) square plate is adjusted with the help of several cutouts which are placed in unique lines like center lines and nodal lines. First of all, plates are modelled with the help of semi-analytic method called Rayleigh-Ritz method for the 1st and 2nd modes since higher modes have higher resonance frequencies. Later, effects of cutouts are included with subtracting kinetic and strain energies of cutouts from those of the plate. Up to 140 Hz frequency shift is proved to be achievable with simply changing position of cutouts. Electrostatic spring softening is calculated and added to general formula. Lastly, thermal effects are considered to have impact on modulus of elasticity, volume and density of the plate. Thermal effects are included in the formula with the help of thermal coefficient of expansion and temperature sensitivity is calculated to 2 Hz/˚C. Analytical model is verified with finite element modelling (FEM) at the end of the second chapter. Several finite element analyses (FEA) including eigenfrequency and thermal modules were done to prove validity. MEMS plates are manufactured by METU MEMS CENTER, which utilizes silicon on insulator (SOI) wafers. A basic test setup with network analyzer, vacuum chamber and power supplies is prepared to test manufactured MEMS plates to observe resonance frequency shift of the plates with cutouts. Quality factors over 9000 with a resonance frequency of 78.6 kHz is shown. With a measured temperature sensitivity of 3.8 Hz/˚C is achieved, proving that these microplate resonators are feasible temperature sensors.

Subject Keywords

Plate vibration, Resonator, Cutout, MEMS, Temperature sensor

URI

https://hdl.handle.net/11511/99435

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Graduate School of Natural and Applied Sciences, Thesis

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Citation Formats

H. Polat, “An array of square plate resonators with adjustable resonance frequency,” M.S. - Master of Science, Middle East Technical University, 2022.