A Capacitive MEMS Accelerometer Readout with Concurrent Detection and Feedback Using Discrete Components

Terzioglu, Yunus
Alper, Said Emre
Azgın, Kıvanç
Akın, Tayfun
This paper presents an analog readout method for capacitive MEMS accelerometers in which the feedback actuation and capacitive detection are achieved simultaneously on the same electrode set. The presented circuit operates in closed-loop for improved linearity, and it is constructed in a hybrid platform package in which off-the-shelf discrete components are used together with the silicon-on-glass micro-accelerometer. The system is developed as a practical solution to reduce the complexity of the readout circuit and the accelerometer without degrading the overall system performance. Experimental results demonstrate 17.5 micro-g per square-root hertz velocity random walk, and 28 micro-g bias instability. Considering the estimated full scale range of 20 g, the dynamic range of the sensor is calculated to be close to 124 dB.


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This paper presents a new fabrication approach and design for a three axis capacitive MEMS accelerometer that is capable of measuring externally applied accelerations in three orthogonal axes. Individual lateral and vertical axis accelerometers are fabricated in the same die on an SOI wafer which is anodically bonded to a glass substrate. Handle layer of the SOI wafer is used as the top electrode for the vertical axis accelerometer. This accelerometer has a 2 mm(2) perforated electrode area anchored to the ...
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This paper presents a high-performance three-axis capacitive microelectromechanical system (MEMS) accelerometer implemented by fabricating individual lateral and vertical differential accelerometers in the same die. The fabrication process is based on the formation of a glass-silicon-glass multi-stack. First, a 35-mu m thick < 111 > silicon structural layer of an Silicon-On-Insulator (SOI) wafer is patterned with deep reactive ion etching (DRIE) and attached on a base glass substrate with anodic bonding, wh...
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This paper presents a single-axis, self-resonating accelerometer. The presented accelerometer incorporates a resonating sensing element which is used along with a closed-loop self-resonance circuit, and the analog force-feedback readout circuit. During operation, the sensing element is oscillated at its fundamental frequency through dedicated actuation electrodes in closed-loop configuration. This oscillation is used to modulate the capacitance difference between another set of differential electrodes which...
Citation Formats
Y. Terzioglu, S. E. Alper, K. Azgın, and T. Akın, “A Capacitive MEMS Accelerometer Readout with Concurrent Detection and Feedback Using Discrete Components,” 2014, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/55423.