A Capacitive MEMS Accelerometer Readout with Concurrent Detection and Feedback Using Discrete Components

Terzioglu, Yunus
Alper, Said Emre
Azgın, Kıvanç
Akın, Tayfun
This paper presents an analog readout method for capacitive MEMS accelerometers in which the feedback actuation and capacitive detection are achieved simultaneously on the same electrode set. The presented circuit operates in closed-loop for improved linearity, and it is constructed in a hybrid platform package in which off-the-shelf discrete components are used together with the silicon-on-glass micro-accelerometer. The system is developed as a practical solution to reduce the complexity of the readout circuit and the accelerometer without degrading the overall system performance. Experimental results demonstrate 17.5 micro-g per square-root hertz velocity random walk, and 28 micro-g bias instability. Considering the estimated full scale range of 20 g, the dynamic range of the sensor is calculated to be close to 124 dB.


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This paper presents an out-of-plane (z-axis) accelerometer, which incorporates the use of two different MEMS capacitive electrode structures in combination for implementing a linear closed-loop system. During the implementation, the complexity of the design and fabrication steps of the sensing element is kept at a minimum. The proposed accelerometer uses capacitive MEMS sensing element fabricated with a 4-mask process. This sensing element includes a comb finger type lateral electrode and a vertical paralle...
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This paper presents a new fabrication approach and design for a three axis capacitive MEMS accelerometer that is capable of measuring externally applied accelerations in three orthogonal axes. Individual lateral and vertical axis accelerometers are fabricated in the same die on an SOI wafer which is anodically bonded to a glass substrate. Handle layer of the SOI wafer is used as the top electrode for the vertical axis accelerometer. This accelerometer has a 2 mm(2) perforated electrode area anchored to the ...
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Ali, Muhammad; Akın, Tayfun; Department of Electrical and Electronics Engineering (2022-11)
This study proposes a new digital control loop-based compact readout circuit for a resonant MEMS accelerometer providing high performance with reduced temperature and power supply dependence while utilizing low processing power. The readout circuit utilizes a charge-sensing pre-amplifier stage that converts the small motional current to readable voltage, which is then converted to the digital domain using a 16-bit ADC to perform the amplitude and frequency extraction in the digital domain. A Proportional In...
Citation Formats
Y. Terzioglu, S. E. Alper, K. Azgın, and T. Akın, “A Capacitive MEMS Accelerometer Readout with Concurrent Detection and Feedback Using Discrete Components,” 2014, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/55423.