FINITE ELEMENT ANALYSIS OF CMUTs: CONVENTIONAL VS. COLLAPSE OPERATION MODES

Date

2006-01-01

Author

Yaralioglu, Goksen G.
Bayram, Barış
Khuri-Yakub, Butrus T.

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

213
views

0
downloads

Collapse mode has been proposed to improve Capacitive Micromachined Ultrasonic Transducer (CMUT) performance in terms of output pressure and receive sensitivity. The focus of this study is to compare the performance of optimized designs for conventional and collapse mode operations using finite element analysis (FEA). For this purpose, we have developed a 2D finite element model for output pressure calculation of CMUTs using commercially available FEA software (ANSYS 10.0). The model is composed of a membrane, a fluid waveguide and an electrical port. The membrane and the fluid part are constructed using axisymmetric plane elements. The electrical port is added to the model by using transducer elements that are already available in ANSYS. Through transient analysis non-linear calculations are performed and average output pressure over the membrane surface is calculated for a given electrical excitation that is applied to the electrical port. First, the effect of various transducer parameters such as radius, thickness, bias voltage, are investigated for conventional mode. Then, the performance of membranes operating in different modes are compared. The parameters of the membranes are selected such that their center frequencies and the collapse voltages match for a fair comparison of transducer performance. Our calculations show that the membrane operating in conventional mode required 100 Vpp AC amplitude for 2 MPa peak-to-peak output pressure whereas 38 Vpp AC excitation generated the same output pressure for collapse mode membrane. In addition, we have compared the second harmonic levels generated by the both designs. For 2MPa peak-to-peak output, the second harmonic amplitude is found to be 13.5 dB below the fundamental for conventional mode design. However, the second harmonic amplitude is -12.0 dB for the collapse mode design.

URI

https://hdl.handle.net/11511/56171

DOI

https://doi.org/10.1109/ultsym.2006.153

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

Suggestions

OpenMETU
Core

FINITE ELEMENT ANALYSIS OF FABRICATION RELATED THERMAL EFFECTS IN CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS Kupnik, Mario; Ergun, Arif S.; Yaralioglu, Goksen G.; Bayram, Barış; Oralkan, Oemer; Wong, Serena H.; Lin, Dersong; Khuri-Yakub, Butrus T. (2006-01-01) The accurate prediction of the static operation point of capacitive micromachined ultrasonic transducer (CMUT) membranes is essential for dynamic performance modeling, device design, and device fabrication. We evaluate whether fabrication-related stress effects in CMUT cells cause significant deviations observed between membrane deflection measurements and calculations. Our finite element analysis (FEA) considers the thermal structural interaction associated with the temperature stress history during device...
Dynamic analysis of CMUTs in different regimes of operation Bayram, Barış; Ergun, AS; Yaralioglu, GG; Khuri-Yakub, BT (2003-01-01) This paper reports on dynamic analysis of an immersed single capacitive micromachined ultrasonic transducer (CMUT) cell transmitting. A water loaded 24 mum circular silicon membrane of a transducer was modeled. The calculated collapse and snapback voltages were 80 V and 50 V, respectively. The resonance frequency, output pressure and nonlinearity of the CMUT in three regimes of operation were determined. These regimes were: a) the conventional regime in which the membrane does not make contact with the subs...
Dynamic modeling of optical systems in order to study vibration effect on performance Avsar, Ahmet Levent; Özgüven, Hasan Nevzat (2010-08-03) In order to determine the vibration effects on performance in optical system, a simple vibratory model is proposed. The model suggested is compared with FE model. Both models are validated by modal tests for an existing simple optical system. The material properties of adhesive, which play an imported role in the vibratory model of an optical system, are found experimentally by using a simple test setup. The model suggested is used to investigate the dynamic behavior of the optical system under random vibra...
Performance Analysis of Reduced Common-Mode Voltage PWM Methods and Comparison With Standard PWM Methods for Three-Phase Voltage-Source Inverters Hava, Ahmet Masum (2009-01-01) This paper surveys the reduced common-mode voltage pulsewidth modulation (RCMV-PWM) methods for three-phase voltage-source inverters, investigates their performance characteristics, and provides a comparison with the standard PWM methods. PWM methods are reviewed, and their pulse patterns and common-mode voltage (CMV) patterns are illustrated. The inverter input and output current ripple characteristics and output voltage linearity characteristics of each PWM method are thoroughly investigated by analytical...
Duty cycle control in wireless sensor networks Yılmaz, Mine; Bilgen, Semih; Department of Electrical and Electronics Engineering (2007) Recent advances in wireless communication and micro-electro-mechanical systems (MEMS) have led to the development of implementation of low-cost, low power, multifunctional sensor nodes. These sensor node are small in size and communicate untethered in short distances. The nodes in sensor networks have limited battery power and it is not feasible or possible to recharge or replace the batteries, therefore power consumption should be minimized so that overall network lifetime will be increased. In order to mi...

Citation Formats

G. G. Yaralioglu, B. Bayram, and B. T. Khuri-Yakub, “FINITE ELEMENT ANALYSIS OF CMUTs: CONVENTIONAL VS. COLLAPSE OPERATION MODES,” 2006, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/56171.