Dynamic analysis of capacitive micromachined ultrasonic transducers

Date

2005-12-01

Author

Bayram, Barış
Kupnik, M
Ergun, AS
Oralkan, O
Nikoozadeh, A
Khuri-Yakub, BT

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Electrostatic transducers are usually operated under a DC bias below their collapse voltage. The same scheme has been adopted for capacitive micromachined ultrasonic transducers (cMUTs). DC bias deflects the cMUT membranes toward the substrate, so that their centers are free to move during both receive and transmit operations. In this paper, we present time-domain, finite element calculations for cMUTs using LS-DYNA, a commercially available finite element package. In addition to this DC bias mode, other new cMUT operations (collapse and collapse-snapback) have recently been demonstrated. Because cMUT membranes make contact with the substrate in these new operations, modeling of these cMUTs should include contact analysis. Our model was a cMUT transducer consisting of many hexagonal membranes; because it was symmetrical, we modeled only one-sixth of a hexagonal cell loaded with a fluid medium. The finite element results for both conventional and collapse modes were compared to measurements made by an optical interferometer; a good match was observed. Thus, the model is useful for designing cMUTs that operate in regimes where membranes make contact with the substrate.

Subject Keywords

Acoustics and Ultrasonics, Instrumentation, Electrical and Electronic Engineering

URI

https://hdl.handle.net/11511/56189

Journal

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

DOI

https://doi.org/10.1109/tuffc.2005.1563269

Collections

Department of Electrical and Electronics Engineering, Article

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Citation Formats

B. Bayram, M. Kupnik, A. Ergun, O. Oralkan, A. Nikoozadeh, and B. Khuri-Yakub, “Dynamic analysis of capacitive micromachined ultrasonic transducers,” IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, pp. 2270–2275, 2005, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/56189.