Three Dimensional Microfabricated Broadband Patch and Multifunction Reconfigurable Antennae for 60 GHz Applications

Hunerli, H. V.
Mopidevi, H.
Cagatay, E.
Imbert, M.
Romeu, J.
Jofre, L.
Cetiner, B. A.
In this paper we present two antenna designs capable of covering the IEEE 802.11ad (WiGig) frequency band (57-66 GHz and 59-66 GHz respectively). The work below reports the design, microfabrication and characterization of a broadband patch antenna along with the design and microfabrication of multifunction reconfigurable antenna (MRA) in its static form excluding active switching. The first design is a patch antenna where the energy is coupled with a conductor-backed (CB) coplanar waveguide (CPW)-fed loop slot, resulting in a broad bandwidth. The feed circuitry along with the loop is formed on a quartz substrate (at 60 GHz), on top of which an SU-8-based three-dimensional (3D) structure with air cavities is microfabricated. The patch metallization is deposited on top of this structure. The second design is a CB CPW-fed loop slot coupled patch antenna with a parasitic layer on top. The feed circuitry along with the loop is formed on a quartz substrate. On top, the patch metallization is patterned on another quartz substrate. The parasitic pixels are deposited on top of these two quartz layers on top of an SU-8 based 3D structure with air cavities.


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Citation Formats
H. V. Hunerli et al., “Three Dimensional Microfabricated Broadband Patch and Multifunction Reconfigurable Antennae for 60 GHz Applications,” 2015, p. 0, Accessed: 00, 2020. [Online]. Available: