Microfluidic channel integrated microwave MEMS biosensor

Kuzubaşlı, Ahmet
Demir, Şimşek
Akın, Tayfun
This invention relates to a robust, microwave biosensor fabricated using MEMS fabrication techniques for highly sensitive and selective, rapid, label-free detection of biological or chemical substances. The biosensor subjected to this invention can be used for In-vitro, Point-of-care diagnostics which can have wide range of applications covering environmental monitoring, drug-discovery, disease diagnosis etc.


Micromechanical modeling of carbon nanotube – polymer composites
Taç, Vahidullah; Gürses, Ercan; Department of Aerospace Engineering (2018)
A micromechanics-based model is developed to simulate carbon nanotube – polymer nanocomposites and analyze its mechanical behavior. The nanocomposite is first divided into four distinct regions, or phases, based on mechanical behavior and density; the carbon nanotube, the interface, the interphase and the polymer. The finite element method was later used to combine the nanotube and interface phases into an effective fiber for better representation and incorporation of their roles and constitutive properties...
Multi-functional metamaterial sensor based on a broad-side coupled SRR topology with a multi-layer substrate
EKMEKÇİ, Evren; Sayan, Gönül (2013-01-01)
This paper intends to demonstrate the feasibility of a miniaturized multi-purpose metamaterial sensor that can be effectively used for chemical, biological and pressure sensing in microwave and terahertz applications. This novel sensor design makes use of the double-sided split ring resonator (DSRR) topology that is modified to have an additional sensing medium sandwiched between two identical broadside coupled SRR unit cells. The resonance frequency of the resulting DSRR sensor shifts as the dielectric per...
Microfluidic sensor applications by using chiral metamaterial
Dalgac, Sekip; BAKIR, MEHMET; KARADAĞ, FARUK; KARAASLAN, MUHARREM; AKGÖL, OĞUZHAN; ÜNAL, EMİN; Sabah, Cumali (World Scientific Pub Co Pte Lt, 2020-02-20)
Chiral metamaterial-based sensor is designed for sensing the change in substance ratio of chemical substances when combined with distilled water. These samples have been prepared with 10%, 50% and 90% volume fraction of methanol, ethanol, acetone, ammonia and isopropyl alcohol. The complex permittivity of the prepared samples has been measured by Agilent 85070E dielectric probe kit and compared with the simulations. In the proposed design, linear shifts with the frequency bands of more than 100 MHz are obse...
Subsurface Silicon Processing by Microsphere Focusing of Ultrafast Infrared Laser
İdikut, Fırat; Seyedpour, S. Esmaeilzad; Bek, Alpan (2019-01-01)
Attention on applications of femtosecond lasers in semiconductor materials processing is ever growing. There has been an increasing research momentum especially towards multi-photon absorption based silicon (Si) processing with infrared lasers in the last decade. Since Si is transparent at wavelengths >1.1 mu m, the processing inside Si is triggered by the nonlinear optical phenomenon of two or more photon absorption which requires laser amplitude to reach and pass beyond threshold conditions. A method that...
Low temperature aluminum doped zinc oxide thin film deposition on ultra-thin flexible glass and PET substrates by RF magnetron sputtering
Demircioglu, Zeynep; Ozkol, Engin; Nasser, Hisham; Turan, Raşit (2015-04-29)
Aluminum doped zinc oxide (AZO) thin films are prepared on ultra-thin flexible glass and flexible polyethylene terephthalate (PET) substrates at room temperature by radio frequency (RF) magnetron sputtering. Optimization of films has been achieved by varying process parameters to reach the demands of proper conductive layer for thin silicon solar cell applications. Structural analysis of the films was done by X-ray diffraction spectroscopy. Optical and electrical properties of the films were carried out by ...
Citation Formats
A. Kuzubaşlı, Ş. Demir, and T. Akın, “Microfluidic channel integrated microwave MEMS biosensor,” 00, 2017.