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Microfluidic channel integrated microwave MEMS biosensor

Kuzubaşlı, Ahmet
Demir, Şimşek
Akın, Tayfun
This invention relates to a robust, microwave biosensor fabricated using MEMS fabrication techniques for highly sensitive and selective, rapid, label-free detection of biological or chemical substances. The biosensor subjected to this invention can be used for In-vitro, Point-of-care diagnostics which can have wide range of applications covering environmental monitoring, drug-discovery, disease diagnosis etc.