Method for suppresion of G-sensitivity of MEMS gyroscope

2017
Azgın, Kıvanç
Akın, Tayfun
Show full item record
332
views
0
downloads
The invention relates to provide a method for suppression of the g-sensitivity of MEMS gyroscope (1) by keeping the movable sense frame of the gyroscope stationary irrespective to the external accelerations with the aid of closed-loop feedback circuit (2)
https://hdl.handle.net/11511/70084
Department of Mechanical Engineering, Patent / Utility Model

Suggestions

Process Development for the Fabrication of a Three Axes Capacitive MEMS Accelerometer
Aydemir, Akin; Akın, Tayfun (2015-09-09)
This paper presents a new approach for the fabrication of a three-axis capacitive MEMS accelerometer that is capable of differentially sensing the acceleration in all three orthogonal axes. For the first time in literature, differential sensing for the out of plane direction is achieved by defining a movable sensing electrode on the structural layer of the SOI wafer that is sandwiched between two stationary electrodes defined on the glass substrate and the handle layer of the SOI wafer enabling the differen...
Design and realization of a step motor driver with micro-stepping capability
Ateş, Emel Hizal; Hızal, Mirzahan; Department of Electrical and Electronics Engineering (2011)
Step motors are motion control mechanisms that convert digital pulses into mechanical shaft rotation. They provide high precision positioning and repeatability of movement without a closed loop control, which is preferable for industrial applications in which accurate positioning control is needed. In this thesis, design and realization of a step motor driver will be performed using micro-stepping, which is based on controlling the current of each winding of the motor continuously and solves noise and reson...
Fabrication of a Three-Axis Capacitive MEMS Accelerometer on a Single Substrate
Aydemir, Akin; Akın, Tayfun (2015-11-04)
This paper presents a new fabrication approach and a design for the fabrication of a three-axis capacitive MEMS accelerometer where differential sensing is enabled for all sense directions. In this approach, individual lateral and vertical axis accelerometers are fabricated in the same die on an SOI wafer which is eutectically bonded to a glass substrate. Differential sensing for the vertical axis accelerometer is realized by defining the proof mass of the accelerometer on the structural layer of the SOI wa...
Investigation of haptic manipulators with linear equations of motion
Kızılbey, Aras; Soylu, Reşit; Department of Mechanical Engineering (2019)
In this thesis, linearization of the equations of motion of haptic interfaces and the effects of such linearization on haptic applications are examined. Three and six DOF configurations of the Phantom Premium™ 1.5 have been selected as the haptic manipulators to be investigated. By utilizing the generic computer code that has been developed for hybrid manipulators composed of revolute and prismatic joints, the equations of motion for the aforementioned two haptic manipulator types are derived in symbolic fo...
Design of kalman filter based attitude determination and control algorithms for a LEO satellite
Efendioğlu, Gamze; Leblebicioğlu, Mehmet Kemal; Department of Electrical and Electronics Engineering (2019)
The design of different attitude controllers by using reaction wheels and magnetic rods as torque sources and the design of a multi-sensor integrated navigation system are developed for a three-axis stabilized Earth-orbiting microsatellite and presented in this thesis. Firstly, the fundamental parameters relevant to satellite attitude determination are presented, such as attitude sensors and actuators, space environmental effects, coordinate frames, satellite dynamic/kinematic equations with control compone...
Citation Formats
K. Azgın and T. Akın, “Method for suppresion of G-sensitivity of MEMS gyroscope,” 00, 2017.
METU IIS - Integrated Information Service open@metu.edu.tr