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Method for suppresion of G-sensitivity of MEMS gyroscope

Azgın, Kıvanç
Gavcar, Hasan Doğan
Akın, Tayfun
The invention relates to provide a method for suppression of the g-sensitivity of MEMS gyroscope (1) by keeping the movable sense frame of the gyroscope stationary irrespective to the external accelerations with the aid of closed-loop feedback circuit (2)