Growth of planar non-polar {1 -1 0 0} m-plane gallium nitride with metalorganic chemical vapor deposition (MOCVD)

İmer, Muhsine Bilge
Denbaars , Steven P.
A method of growing planar non-polar m-plane III-Nitride material, such as an m-plane gallium nitride (GaN) epitaxial layer, wherein the III-Nitride material is grown on a suitable substrate, such as an m-plane silicon carbide (m-SiC) substrate, using metalorganic chemical vapor deposition (MOCVD). The method includes performing a solvent clean and acid dip of the substrate to remove oxide from the surface, annealing the substrate, growing a nucleation layer such as an aluminum nitride (AIN) on the annealed substrate, and growing the non-polar m-plane III-Nitride epitaxial layer on the nucleation layer using MOCVD.


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Submicrometer-sized, pure calcium hydroxyapatite (HA, (Ca-10(PO4)(6)(OH)(2))) and eta-tricalcium phosphate (beta-TCP, Ca-3(PO4)(2)) bioceramic powders, that have been synthesized via chemical precipitation techniques, were used in the preparation of aqueous slurries that contained methyl cellulose to manufacture porous (70%-95% porosity) HA or beta-TCP ceramics. The pore sizes in HA bioceramics of this study were 200-400 mu m, whereas those of beta-TCP bioceramics were 100-300 mu m. The pore morphology and ...
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Boron nitride is a promising material with its outstanding characteristics like chemical inertness, large band gap, high oxidation resistance and thermal conductivity. It is also used as ceramic matrix component which transfers external load and deflects matrix cracks. Therefore, it has become a subject matter for many studies. In this study, the process of boron nitride (BN) production from diborane (B2H6) and ammonia (NH3) on tungsten (W) substrate in impinging jet reactor is investigated using chemical v...
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Kaya, Şafak; Tinçer, Teoman; Department of Polymer Science and Technology (2009)
Synthesis of a polymer with benzoxazine units in the main chain backbone by a trifunctional phenol, a difunctional amine, and paraformaldehyde was achieved. Thermal, mechanical and spectroscopic characterization and the viscosity properties of the synthesized polymer were studied. In the first step of this study, a fast and feasible method for the synthesis of the benzoxazine precursors was developed since some methods mentioned in the literature about the synthesis of the benzoxazine derivatives last long ...
Synthesis of Optically Complex, Porous, and Anisometric Polymeric Microparticles by Templating from Liquid Crystalline Droplets
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It is demonstrated that aqueous dispersions of micrometer-sized liquid crystal (LC) droplets provide the basis of a general and facile methodology for the templated synthesis of spherical and nonspherical polymeric micro-particles with complex internal structure and porosity. Specifically, nematic droplets of reactive (RM257)/nonreactive mesogens with distinct internal configurations are prepared using a range of approaches, the reactive mesogens are photopolymerized, and then the nonreactive mesogens are e...
Citation Formats
M. B. İmer and S. P. Denbaars, “Growth of planar non-polar {1 -1 0 0} m-plane gallium nitride with metalorganic chemical vapor deposition (MOCVD),” 00, 2006.