Effect of Annealing on the Structural, Chemical and Electrical Characteristics of the HfO2 Thin Films

Date

2017-04-03

Author

Kaya, Şenol
Lök, Ramazan
Aktağ, Aliekber
Karaçalı, Hüseyin
Yıldız, İlker
Yılmaz, Ercan

Metadata

Show full item record

Item Usage Stats

357
views

0
downloads

Nowadays researchers have been considered to exploring the new high-k materials to be used in state of art CMOS technology to replace conversional SiO2 dielectrics. Various high-k dielectrics materials HfO2 have been considered, but the HfO2 has reported as one of the most promising materials among them. In addition, crystallization and morphological variations change the electrical performance of the device. Hence we aim to study effects of annealing temperature on the Structural, chemical and electrical characteristics of the HfO2 thin films deposited by RF sputtering. The annealing were performed at 300 °C and 550 °C in forming gas environment for 30 minutes. The structural characterizations were studied by XRD and AFM measurements while the chemical evolution and electrical characteristics were discussed by XPS and C-V measurements of the film, respectively. Results demonstrate that the film crystallinity were enhanced and surface roughness decrease with annealing. In addition, the SiO2 interfacial layer formation was observed after annealing and the peak intensity rise with annealing temperature. The capacitances of device significantly decrease after 550 °C annealing. It may be conclude that the optimum annealing temperature is 300 °C for the HfO2 to be used in MOS based technology.

URI

https://hdl.handle.net/11511/71953
https://easychair.org/smart-program/COSTTO-BESpringMeeting2017/2017-04-03.html#talk:37189

Conference Name

Cost To-Be Spring Meating 2017 (03 - 05 Nisan 2017)

Collections

Other, Conference / Seminar

Suggestions

OpenMETU
Core

Effect of CNTs dispersion on electrical, mechanical and strain sensing properties of CNT/epoxy nanocomposites Tanabi, Hamed; Erdal Erdoğmuş, Merve (Elsevier BV, 2019-03-01) The remarkable electrical and mechanical properties of carbon nanotubes (CNTs) render CNT-reinforced nanocomposites as potentially attractive materials for strain-sensing and monitoring purposes. The dispersion state of CNTs in polymeric matrix has a significant role on the physical and the mechanical properties of the resulting CNT reinforced nanocomposites. In this study, a series of experiments were designed to investigate the effect of dispersion process parameters and CNT concentration, as well as thei...
Effect of material properties on interaction of ceramic and glass flyer plates with hypervelocity jet Deniz, Tansel; Yıldırım, Raif Orhan (2022-02-01) A study on the effect of material properties on the interaction of explosively driven ceramic and glass plates with shaped charge jets is performed in order to bolster future studies on the design of reactive cassettes with non-steel flyer plates. A symmetric steel reactive cassette construction is taken as a base, and front and back plates are selectively changed with ceramic or glass plates keeping the areal densities similar. Plates manufactured from two different grades of alumina, silicon carbide, boro...
Effect of CNT impregnation on the mechanical and thermal properties of C/C-SiC composites Tulbez, Simge; ESEN, ZİYA; Dericioğlu, Arcan Fehmi (2020-06-01) The present study investigates the effect of additional carbon source, in the form of carbon nanotubes (CNTs), on mechanical and thermal properties of carbon fiber reinforced silicon carbide (C/C-SiC) ceramic matrix composites (CMC) produced by liquid silicon infiltration (LSI) technique. The CNTs used in this study were impregnated into the C/C preforms before the liquid silicon infiltration stage. The results showed that the addition of excess carbon to the C/C preforms in the form of CNTs enhanced Si inf...
Effects of boron compounds on thermal degradation behaviour of polymers involving ester linkages Çetinkaya, Nezaket Nehir; Hacaloğlu, Jale; Kaynak, Cevdet; Department of Polymer Science and Technology (2021-2-10) Interest in polymer nanocomposites is growing exponentially across various scientific and engineering disciplines owing to their remarkable improvements in theirproperties compared to micro-and macro-conventional composites. Although polymers having good physical properties are commercially available, they are mostly hampered by their low melting temperatures, poor mechanical or barrier properties. Therefore, there is a considerable work on improvement of the proper...
Role of Stabilizing Surfactants on Capacitance, Charge, and Ion Transport in Organic Nanoparticle-Based Electronic Devices Ameri, Mohsen; Al-Mudhaffer, Mohammed F.; Almyahi, Furcian; Fardell, Georgia C.; Marks, Melissa; Al-Ahmad, Alaa; Fahy, Adam; Andersen, Thomas; Elkington, Daniel C.; Feron, Krishna; Dickinson, Michael; Samavat, Feridoun; Dastoor, Paul C.; Griffith, Matthew J. (2019-03-01) Deposition of functionalized nanoparticles onto solid surfaces has created a new revolution in electronic devices. Surface adsorbates such as ionic surfactants or additives are often used to stabilize such nanoparticle suspensions; however, little is presently known about the influence of such surfactants and additives on specific electronic and chemical functionality of nanoparticulate electronic devices. This work combines experimental measurements and theoretical models to probe the role of an ionic surf...

Citation Formats

Ş. Kaya, R. Lök, A. Aktağ, H. Karaçalı, İ. Yıldız, and E. Yılmaz, “Effect of Annealing on the Structural, Chemical and Electrical Characteristics of the HfO2 Thin Films,” presented at the Cost To-Be Spring Meating 2017 (03 - 05 Nisan 2017), Lüksemburg, 2017, Accessed: 00, 2021. [Online]. Available: https://hdl.handle.net/11511/71953.