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MİKRO OLUKLU ISI BORUSU ÜRETİMİ İÇİN FARKLI MİKRO ÜRETİM YÖNTEMLERİNİN İRDELENMESİ
Date
2015-09-05
Author
Serdar, Taze
Çetin, Barbaros
Yılmaz, Mehmet
Dursunkaya, Zafer
Metadata
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MEMS ve elektronik teknolojisinde yaşanan gelişmeler sonucunda başta savunma sanayi olmak üzere birçok farklı uygulamada elektronik yapıların güvenli bir şekilde çalışabilmesi için çok küçük alanlardan çok yüksek miktarda ısının çekilmesi gerekmektedir. Bu amaca yönelik olarak faz değişimi ısı transferi mekanizmalarının kullanılması avantaj sağlamaktadır. Bu noktada hem yüksek akıda ısı transferinin daha az sıcaklık farkı ile gerçekleştirme kabiliyetleri hem de hareket edenparçalarının olmaması ve güvenilirliklerinin yüksek olmasından dolayı ısı borularının kullanım alanları genişlemekte ve havacılık gibi lider endüstrilerde elektronik ekipmanların soğutulmasında sıklıkla kullanılmaktadır. Bu çalışmada Silikon devre levhasıüzerinde mikro-oluklu ısı borusu uygulamasına yönelik farklı mikro-üretim tekniklerinin değerlendirmesi yapılmıştır. Mikro-olukların açılmasına yönelik kimyasal aşındırma, minyatür-işleme ve mekanik kesme yöntemleri kullanılmıştır. Üretim için Bilkent Üniversitesi Ulusal Nanoteknoloji Araştırma Merkezi ve Bilkent Üniversitesi Mikro sistem Tasarım ve Üretim Merkezi imkanları kullanılmıştır. Bu yöntemlerin avantajları ve dezavantajları tartışılmıştır
Subject Keywords
Isı borusu
,
Mikro-oluk
,
Kimyasal aşındırma
,
Minyatür-işleme
,
Mekanik kesme
,
Heat pipe
,
Micro-groove
,
Chemical etching
,
Micro-machining
,
Mechanical cutting
URI
https://hdl.handle.net/11511/73074
Conference Name
ULIBTK’15 20. Ulusal Isı Bilimi ve Tekniği Kongresi (02-5 Eylül 2015)
Collections
Department of Philosophy, Conference / Seminar
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T. Serdar, B. Çetin, M. Yılmaz, and Z. Dursunkaya, “MİKRO OLUKLU ISI BORUSU ÜRETİMİ İÇİN FARKLI MİKRO ÜRETİM YÖNTEMLERİNİN İRDELENMESİ,” presented at the ULIBTK’15 20. Ulusal Isı Bilimi ve Tekniği Kongresi (02-5 Eylül 2015), Balıkesir, Türkiye, 2015, Accessed: 00, 2021. [Online]. Available: https://hdl.handle.net/11511/73074.